Adjustment method of gas concentration quasi-static adjustment equipment based on mass spectrometry feedback
A technology for gas concentration and adjustment equipment, applied in measurement devices, instruments, scientific instruments, etc., can solve the problems of inability to accurately adjust the concentration of gas in the right position, no feedback mechanism, etc., to improve stability, improve sensitivity, The effect of expanding the concentration range
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[0036] In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention.
[0037] see figure 1 , The gas concentration quasi-static adjustment device based on mass spectrometry feedback provided by the embodiment of the present invention includes a gas distribution instrument, a mass spectrometer 15 communicated with the gas distribution instrument, and an embedded control system. The mass spectrometer 15 uses the embedded control system to perform mass spectrometry measurement on the gas in the gas distribution instrument.
[0038] The gas distribution instrument includes cylinder 18, piston 16, valve one 7, valve two 8, valve three 9, buffer pool one 4, buffer...
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