Preparation method of fluorinated graphene foam

A technology of fluorinated graphene and graphene foam, which is applied in the field of new materials, can solve problems such as the inability to prepare fluorinated graphene foam, and achieve the effects of high fluorination degree, good fluorination properties, and good controllability

Inactive Publication Date: 2015-09-23
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

But this method cannot prepare fluorinated graphene foam

Method used

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  • Preparation method of fluorinated graphene foam
  • Preparation method of fluorinated graphene foam

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0017] Take a cylindrical graphene foam with a diameter of 1 cm and a height of 0.5 cm, place it on a 4-inch liner, put it into the sample delivery chamber of the deep reaction etching machine, and pump the air pressure of the sample delivery chamber to 10 -3 Below Torr, it is sent into the reaction chamber; after the sample is fixed, the air pressure in the reaction chamber is pumped to 10 -6 Below Torr, then pass into SF 6 Gas, flow rate is 100 sccm; for SF 6 Perform plasma excitation with a power of 200W, and the reaction time is 1 minute; after the reaction is completed, fill with nitrogen, and when the pressure in the reaction chamber is the same as that of the sample delivery chamber, transfer the sample to the sample delivery room, and continue to fill with nitrogen until it reaches atmospheric pressure Remove the sample on the liner. At this point, the graphene foam has reacted to generate fluorinated graphene foam.

[0018] Carry out XPS characterization to the flu...

Embodiment 2

[0020] Take 1x1x1cm 3 Large and small cubic graphene foam samples are placed on a 4-inch liner, put into the sample delivery chamber, and the air pressure in the sample delivery chamber is pumped to 10 -3 Below Torr, it is sent into the reaction chamber; after the sample is fixed, the air pressure in the reaction chamber is pumped to 10 -6 Below Torr, then pass into SF 6 Gas, flow rate is 100 sccm; for SF 6 Perform plasma excitation with a power of 25W, and the reaction time is 20 minutes; after the reaction is completed, fill with nitrogen gas, and when the pressure of the reaction chamber is the same as that of the sample delivery chamber, transfer the sample to the sample delivery chamber, and continue to fill with nitrogen gas until it reaches atmospheric pressure The sample on the liner was taken out to obtain the fluorinated graphene foam.

Embodiment 3

[0022] Get diameter and be 4 inches, the disc-shaped graphene foam that height is 0.5cm, and it is placed on the liner of 4 inches of size, puts into the sample delivery chamber of deep reaction etching machine, the air pressure of sample delivery chamber is pumped to 10 -3 Below Torr, it is sent into the reaction chamber; after the sample is fixed, the air pressure in the reaction chamber is pumped to 10 -6 Below Torr, then pass into SF 6 Gas, flow rate is 100 sccm; for SF 6 Perform plasma excitation with a power of 300W, and the reaction time is 30s; after the reaction is completed, fill in nitrogen gas, and when the pressure in the reaction chamber is the same as that in the sample delivery room, transfer the sample to the sample delivery room, and continue to fill in nitrogen gas until it reaches atmospheric pressure Remove the sample on the liner. At this point, the graphene foam on the copper grid has reacted to form fluorinated graphene foam.

[0023] According to t...

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Abstract

The invention discloses a preparation method of fluorinated graphene foam. Fluorinated graphene is prepared by mainly adopting a deep-reaction etching method and taking SF6 gas as a fluorinating agent. The fluorinated graphene foam can be in any needed shape. The fluorinated graphene foam prepared by the method is high in fluorinating degree and good in fluorinating property. Compared with other fluorinating methods, the preparation method has the advantages of simplicity and convenience in equipment and process course, high controllability, low preparation cost and supportiveness of mass production. Size of the fluorinated graphene foam can reach wafer grade, so that a good foundation is laid for property exploration of the fluorinated graphene foam and machining of fluorinated graphene devices.

Description

technical field [0001] The invention belongs to the field of new materials and relates to a preparation method of fluorinated graphene foam. Background technique [0002] As a new derivative of graphene foam, fluorinated graphene foam not only maintains the high-strength properties of graphene foam, but also brings novel interfaces and properties such as reduced surface energy, enhanced hydrophobicity, and widened band gap due to the introduction of fluorine atoms. Physical and chemical properties. At the same time, the fluorinated graphene foam is resistant to high temperatures and has stable chemical properties, showing properties similar to polytetrafluoroethylene, and is called "two-dimensional Teflon". These unique properties of fluorinated graphene foams have broad application prospects in the fields of interfaces, new nanoelectronic devices, and lubricant materials. [0003] At present, a conventional method for synthesizing fluorinated graphene is to use a fluorina...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B31/00
Inventor 徐杨陆薇孟楠万霞程呈阿亚兹郭宏伟周翰铭王雪施添锦王锋马玲玲刘雪梅李炜刘威
Owner ZHEJIANG UNIV
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