Gas concentration sensor with a suspended structure

A concentration sensor and concentration technology, used in instruments, scientific instruments, chemical instruments and methods, etc., can solve problems such as interference measurement, and achieve reliable measurement values ​​and high resolution.

Active Publication Date: 2015-08-19
COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

But in the case of amplitude measurements, various phenomena can interfere with the measurement

Method used

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  • Gas concentration sensor with a suspended structure
  • Gas concentration sensor with a suspended structure
  • Gas concentration sensor with a suspended structure

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Embodiment Construction

[0042] A gas concentration sensor according to the invention is used to measure the concentration of at least one gas analyte mixed with a carrier gas. The concentrations mentioned in the description below are thus the concentrations of the analytes.

[0043] In the following description, phase shift refers to the phase shift between the response signal or output signal and the excitation signal. The response signal, also called the output signal, is the change in temperature of the suspension, which is obtained by measuring the change in the resistance of the suspension, which is obtained by measuring the change in voltage at the terminals of the suspension .

[0044] exist figure 1 An exemplary measuring device according to the invention can be seen in , comprising a suspension structure 2 at its two longitudinal ends with respect to a support 4 . In the example shown, the suspension structure is formed by nanowires 2 anchored to the support using fixing pads 3 forming co...

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Abstract

A concentration sensor for at least one given gas comprising at least one suspended structure (2) with respect to a support, said suspended structure (2) being of an electrically conductive material and said structure having a low heat response time, means for biasing said suspended element (2) and means (8) for measuring the variation of the electric voltage at the terminals of the suspended structure (2), the biasing means (6) being formed by an alternating current source the intensity of which heats the suspended structure (2) and the frequency of which gives rise to a phase shift between a signal of the biasing means and a signal measured by the measuring means, and means for determining a phase shift variation due to a gas concentration variation and means for determining the concentration variation of said gas from the phase variation.

Description

technical field [0001] The invention relates to a gas concentration sensor with a suspension structure. Background technique [0002] There are gas concentration sensors that measure using heat exchange between the sensor body and the gaseous medium in which the sensor is located. Changes in the fluid medium alter the heat exchange, and by measuring the change in heat exchange, the gas concentration of the gaseous medium can be determined. [0003] Document WO 2001 / 044547 describes a TCD (Thermal Conductivity Detectors) sensor that uses changes in heat conduction to determine the composition of the surrounding gaseous environment. The sensor is placed at the outlet of the column. The TCD sensor includes an elongated support plate and a heating element on the support plate. Voltage changes are measured at the terminals of the heated support plate to determine changes in resistance that depend on the temperature of the support plate and represent heat exchanges between the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N25/12
CPCG01N27/18G01N30/62B01D53/02
Inventor 耶雷米·鲁伦劳伦特·杜拉福格
Owner COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
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