Pressure Sensor
A pressure sensor and pressure technology, applied in the direction of measuring fluid pressure, instruments, measuring fluid pressure through electromagnetic components, etc., can solve the problems of data loss, inability to output signals, loss of EPROM data, etc.
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[0064] Next, an embodiment for carrying out the present invention will be described in detail with reference to the drawings.
[0065] figure 1 An embodiment of the pressure sensor of the present invention is shown. The pressure sensor 1 has a pressure detection element 21 inside, and has a pressure detection part 2 connected to a fluid inflow part 22 and a joint connection part 3 that surrounds the pressure sensor. The detection unit 2 further accommodates a wiring board (hereinafter referred to as “substrate”) 31 connected to the pressure detection element 21 and lead wires 32 for external output.
[0066] The pressure detection unit 2 has a pressure detection element 21 , a base 23 , a receiving member 24 disposed opposite to the base 23 , and a diaphragm 25 sandwiched between the base 23 and the receiving member 24 . An insulating liquid such as oil is sealed in the pressure receiving space 26 between the base 23 and the diaphragm 25 . The pressure detection element 21 i...
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