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Surface pattern defect measurement device for transparent substrates

A technology for measuring devices and surface patterns, which is applied to measuring devices, using optical devices, and conducting material analysis by optical means, etc., can solve the problems of increased light-dark contrast, reduced detection accuracy, and reduced light-dark contrast, so as to increase light and dark. Contrasting, easily measurable effects

Active Publication Date: 2017-12-15
GIGAVIS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the small difference in reflectance between this pattern material and the transparent substrate, the light-dark contrast is greatly reduced when measuring, thus reducing the detection accuracy.
For this reason, it is necessary to make the light-dark contrast relatively large when the difference in reflectance such as the transparent substrate and the pattern substance is not large

Method used

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  • Surface pattern defect measurement device for transparent substrates
  • Surface pattern defect measurement device for transparent substrates
  • Surface pattern defect measurement device for transparent substrates

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Embodiment Construction

[0019] Although terms such as first and second can be used to describe various structural elements, the above structural elements should not be limited by the above terms. The above terms are only used to distinguish one structural element from other structural elements. For example, without departing from the protection scope of the present invention, a first structural element can be named as a second structural element, and similarly, a second structural element can also be named as a first structural element. The term "and / or" includes a combination of multiple related items or an item among multiple related items.

[0020] When it is said that a certain structural element is "connected" or "connected" to other structural elements, although it can be understood as being directly connected or connected to other structural elements, it can also be understood that there may be other structural elements in between. On the contrary, when it is said that a certain structural el...

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Abstract

The present invention relates to an apparatus to measure a defect in a surface pattern of a transparent substrate. More specifically, a substance having small reflectance is patterned on a transparent substrate to make reflectance of the transparent substrate close to 0, even if the reflectances of the transparent substrate and the patterned substance do not have a great difference, thus relatively bringing about an increase in the reflectance of the patterned substance and increasing the reflectance contrast of the patterned substance and the transparent substrate, thereby measuring a surface pattern with higher detection accuracy or measuring the defect of the pattern.

Description

technical field [0001] The present invention relates to a surface pattern defect measuring device of a transparent substrate. More specifically, it relates to a device for measuring a surface pattern defect of a transparent substrate, even if a pattern is formed on the transparent substrate by a substance having a low reflectance, and there is no large difference in reflectance between the transparent substrate and the patterned substance. It can make the reflectance of the transparent substrate close to 0, thereby bringing about the effect of a relative increase in the reflectance of the pattern material, and improving the reflection contrast between the pattern substance and the transparent substrate, thereby determining whether the surface pattern or the pattern that improves the detection accuracy is defective device. Background technique [0002] figure 1 A conceptual diagram showing a general scanning device. [0003] figure 1 The shown scanning device comprises: a ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/956G01N21/958
CPCG01B11/303G01N21/8806G01N21/896G01N21/956
Inventor 全载弼白承丸金泽兼金德镐
Owner GIGAVIS CO LTD
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