High vacuum rotary seal mechanism

Abstract

The invention discloses a high-vacuum degree rotary sealing mechanism. The high-vacuum degree rotary sealing mechanism comprises a sealing sleeve, a pressure head, a rotary piece, at least one first soft sealing ring, at least one hard compression ring, and a fastener, wherein a first through hole is formed in the bottom of the sealing sleeve and the axial direction of the first through hole is parallel to that of the sealing sleeve; a second through hole is formed in the pressure head to penetrate through the pressure head; the rotary piece is put through and pivoted in the first through hole and the second through hole; the at least one first soft sealing ring hermetically sleeves the rotary piece and is located in the sealing sleeve; each compression ring hermetically sleeves the rotary piece; each compression ring is located on one side, close to the opening of the sealing sleeve, of the corresponding first soft sealing ring; the pressure head is detachably fixed at the opening of the sealing sleeve by use of the fastener, and the fastener is used for driving the pressure head to be switched between a position where the pressure head extends into the sealing sleeve and props against the compressing ring and a position where the pressure head is far away from the sealing sleeve and separated from the compression ring. The high-vacuum degree rotary sealing mechanism is capable of keeping a relatively high vacuum degree in a vacuum chamber and realizing an excellent dynamic sealing effect under the circumstance that the rotary piece rotates.

Description

technical field [0001] The invention relates to the field of sealing devices, in particular to a high-vacuum rotary sealing mechanism. Background technique [0002] In high-vacuum structures such as high-temperature furnaces and crystal growth furnaces, when rotating parts are used, the traditional rotary sealing mechanism has a short service life and a complex structure, which can easily cause air leakage, damage the vacuum degree, and affect the functionality of the entire mechanism. . At present, most sealing mechanisms use O-ring seals, but for parts requiring high vacuum, O-rings are similar to line seals. Any impurities or manufacturing defects on the sealing line will cause air leakage and damage the vacuum. . Contents of the invention [0003] In order to overcome the deficiencies of the prior art, the object of the present invention is to provide a high-vacuum rotary sealing mechanism, which can maintain a relatively high vacuum in the vacuum chamber when the ro...

AI Technical Summary

Problems solved by technology

[0002] In high-vacuum structures such as high-temperature furnaces and crystal growth furnaces, when rotating parts are used, the traditional rotary sealing mechanism has a short service life and a complex structure, which can easily cause air leakage, damage the vacuum degree, and affect the functionality of the entire mechanism.

At present, most sealing mechanisms use O-ring seals, but for parts requiring high vacuum, O-rings are similar to line seals. Any impurities or manufacturing defects on the sealing line will cause air leakage and damage the vacuum.

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