Symmetric fully decoupled double-mass silicon microgyroscope based on double-tuning fork effect

Abstract

The invention discloses a dual-tuning fork effect-based symmetric full-decoupling dual-mass block silicon micro-gyroscope which comprises two vertical layers, wherein the upper layer is a mechanical module of a silicon micro-gyroscope, the lower layer is a glass substrate on which a signal lead is spread, the mechanical module of the micro-gyroscope is composed of two completely same sub-modules which are horizontally and symmetrically arranged, two sensitive mass blocks are connected in a driving direction and a sensitive direction respectively by driving coupling folding beams and cross beams so that the two sensitive mass blocks are mutually associated in a drive mode and a detection mode. Each sub module comprises a sensitive mass block, a drive module, a drive feedback module, detection modules, drive support beams, drive feedback support beams, detection support beams, drive decoupling beams, detection decoupling beams, detection coupling support beams and fixed anchor points. According to the dual-tuning fork effect-based symmetric full-decoupling dual-mass block silicon micro-gyroscope disclosed by the invention, the two sub modules adopt a co-frequency inverted phase drive mode, and the detection module realizes differential detection, and thus influences of outside impaction, temperature and manufacturing deficiency can be effectively inhibited, and the common-mode error resisting capability is strong.

Description

technical field [0001] The invention belongs to the field of micro-electro-mechanical systems and micro-inertia measurement, in particular to a symmetrical full-decoupling double-mass silicon micro-gyroscope based on the double-tuning fork effect. Background technique [0002] The miniaturization and integration of mechanical modules and electronic systems—the emergence of microelectromechanical systems (MEMS) technology has brought a revolution to the field of inertial sensors. Among them, the silicon micro gyroscope has excellent performances such as miniaturization and integration, high reliability, low power consumption, easy digitization and intelligence, and good dynamic performance. With the continuous improvement of performance, silicon micro gyroscopes have replaced some traditional gyroscopes, and have been widely used in consumer electronics, automobile industry, biomedicine and other fields. [0003] In the prior art, the dual-mass silicon micro-gyroscope uses t...

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Problems solved by technology

[0003] In the prior art, the dual-mass silicon micro-gyroscope uses two sub-modules that are independent of each other, that is, the two sensitive masses are not associated in the driving mode and the detection mode, or the two sensitive masses are associated in the driving mode but not in the detection mode. The module design method in which the detection modes are not related makes the vibration frequencies of the driving and detection modes of the two sub-modules not completely consistent, and is easily affected by interference modes such as in-phase mode and torsional mode, making it difficult to achieve accurate differential Detection, poor ability to resist common mode interference; at the same time, silicon micro gyroscopes mostly adopt the form of non-decoupling or semi-decoupling modules, and there is a large coupling between the driving mode and the detection mode. In this case, the vibration energy of the driving mode will also be coupled to the detection mode, resulting in a large output error

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