A three-leaf aberration deformable mirror device

Abstract

The invention discloses a trefoil aberration deformation mirror device which belongs to the field of system aberration compensation of optical systems and aims at solving the problems that the mounting and the detection are hard to perform and the moving rigid body displacement is large in the prior art. The device comprises an optical element, a deformable mirror frame, six actuators, six displacement sensors, an upper fixed plate and a lower fixed plate, wherein the optical element and the deformable mirror frame are connected to form a mirror frame component in an adhesion or compression mode; the upper fixed plate and the lower fixed plate are respectively fixed on the deformable mirror frame through screws; three actuators which are distributed at an angle of 120 degrees in the circumferential direction are arranged on the upper fixed plate; three actuators which are distributed at an angle of 120 degrees in the circumferential direction are arranged on the lower fixed plate; the six actuators on the upper fixed plate and the lower fixed plate are distributed at an angle of 60 degrees; the actuators are arranged along the optical axis of the optical element; input displacement vertically acts on the deformable mirror frame; the six displacement sensors are respectively arranged on the upper fixed plate and the lower fixed plate and are opposite to the six actuators.

Description

technical field [0001] The invention belongs to the field of system aberration compensation of an optical system, in particular to the system aberration compensation in a lithographic projection objective lens system, and in particular relates to a three-leaf aberration deformation mirror device capable of causing an optical element to produce three-leaf aberration deformation. Background technique [0002] For the manufacturing process of large-scale integrated circuits, projection lithography is the most critical process, which requires the use of projection lithography machines, and the projection objective lens is the core of projection lithography machines, and its performance directly determines the graphics transfer of lithography ability. [0003] During the assembly and use of the lithography projection objective lens, due to assembly errors or thermal loads, etc., it is easy to cause three-lobed aberration in the system and affect the optical performance of the pro...

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Problems solved by technology

[0005] The purpose of the present invention is to propose a three-leaf aberration deformable mirror device, which solves the problems of difficult installation and detection and large displacement of rigid body introduced in the prior art

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