A high-precision and high-efficiency monolithic two-degree-of-freedom microgripper for optical fiber assembly

Abstract

The invention discloses a high-accuracy and high-efficiency monolithic two-degree-of-freedom micro-gripper for assembling an optical fiber. The monolithic two-degree-of-freedom micro-gripper comprises a capacitive sensor, a piezoelectric ceramics actuator A, a piezoelectric ceramics actuator B, a motion transmission mechanism, a base, a sensor mounting base, a glass patch, a pre-tightening bolt and a fixing bolt. The motion transmission mechanism is arranged above a concave cavity formed in the base, the sensor mounting base is arranged on the left upper side of the base, and the glass patch is arranged on an inner side panel of a second output plate; the output force of the piezoelectric ceramics actuator A and the piezoelectric ceramics actuator B is distributed along a Y axis, and the two piezoelectric ceramics actuators are placed in parallel; the capacitive sensor is used for sensitively measuring the displacement change of the first output plate on an X axis, and is arranged on the sensor mounting base. By adopting the high-accuracy and high-efficiency monolithic two-degree-of-freedom micro-gripper, problems concerning heavy clamping and rubbing specific to alignment of the rotating angle in the assembling process of a polarization maintaining fiber are solved, meanwhile the assembling efficiency is increased on the premise of ensuring the aligning accuracy of the rotating angle of the polarization maintaining fiber, and the production cost is effectively reduced.

Description

technical field [0001] The invention relates to a micro-clamp mechanism, more particularly, a novel high-precision and high-efficiency monolithic two-degree-of-freedom micro-clamp for optical fiber assembly. Background technique [0002] The optical switch (or MEMS optical switch) based on MEMS (Micro-Electro-Mechanical-Systems) chips is a composite system integrating silicon chips and optical fibers, which is used for optical path switching in a new generation of all-optical communication networks . [0003] However, since MEMS chips and optical fibers are fragile components, their integrated assembly must not only consider the coupling efficiency of optical fibers, but also consider the damage of these components during the assembly process. As a result, the assembly of MEMS optical switches often requires a complex and precise micro-operating system, resulting in high packaging costs, which affects the application and popularization of MEMS optical switches. For U-groov...

AI Technical Summary

Problems solved by technology

[0003] However, since MEMS chips and optical fibers are vulnerable components, their integrated assembly must not only consider the coupling efficiency of optical fibers, but also consider the damage of these components during the assembly process.

As a result, the assembly of MEMS optical switches often requires a complex and sophisticated micro-operating system, resulting in high packaging costs, which affects the application and popularization of MEMS optical switches.

The assembly problem is even more severe for U-groove MEMS optical switches with high reliability and high optical coupling efficiency

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