A kind of micro-device and packaging mold for micro-device
A technology for micro-devices and molds, applied in piezoelectric devices/electrostrictive devices, microstructure devices, piezoelectric/electrostrictive/magnetostrictive devices, etc., which can solve the problems of device contamination and high requirements for repackaging , to ensure the packaging molding, prevent the spread of colloid, and ensure the effect of protection
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[0017] The present case will be further described below in conjunction with specific embodiments and accompanying drawings.
[0018] See figure 1 , figure 1 A packaging mold 100 for a micro device 200 provided by a preferred embodiment of the present invention and a micro device 200 molded by the packaging mold 100 are shown. The micro-device 200 is shown in the form of a black cuboid, which has an internal channel (not shown) connecting its front and rear ends. The packaging mold 100 includes a substrate 110 and a cover plate 120 that are covered with each other, wherein the cover plate 120 includes an inlet 121 disposed on the top thereof, and an outlet 122 disposed on one side thereof.
[0019] When the cover plate 120 and the substrate 110 cover each other, a sealed cavity 130 closely matching the size of the micro device 200 is formed, and an inflow cavity 131 and an outflow cavity 132 are formed at two ends of the sealed cavity 130 . Wherein, the sealed cavity 130 is ...
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