Fabrication method of fiber alignment pedestal array
A technology for optical fiber alignment and manufacturing methods, applied in the direction of optical waveguide and light guide, can solve the problems of high cost, optical signal power loss, low efficiency, etc., and achieve the effect of high output and stable process
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[0030] Such as figure 1 Shown is the flow chart of the method of the embodiment of the present invention; Figure 2A to Figure 2I Shown is a device structure diagram in each step of the method of the embodiment of the present invention. The manufacturing method of the optical fiber alignment base array in the embodiment of the present invention includes the following steps:
[0031] Step 1. Draw an array pattern of the fiber alignment base on the photolithographic plate, and the array pattern of the fiber alignment base defines the size and array of the holes of the fiber alignment base. The fiber alignment base array pattern includes a circular hole array pattern formed according to fiber size and fiber array arrangement, and a marking hole pattern for distinguishing the front and back of the fiber alignment base.
[0032] Step two, such as Figure 2A As shown, a silicon oxide film-2 is grown on the back surface of the silicon wafer 1, and the thickness of the silicon wafe...
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