Independent low-return-difference and high-rescanning probe microscope scanner

Abstract

The invention discloses an independent low-return-difference and high-rescanning probe microscope scanner, and relates to a scanning structure of a scanning probe microscope. The independent low-return-difference and high-rescanning probe microscope scanner comprises an XYZ piezoelectric scanning tube, a guide rail rack, a sliding rod and a spring piece, wherein the XYZ piezoelectric scanning tube and the sliding rod are coaxial and mutually fixed at one end, the outer wall of the sliding rod is pressed on a guide rail of the guide rail rack in parallel by the spring piece, and both the two ends of the sliding rod stretch beyond the length of the guide rail of the guide rail rack. The independent low-return-difference and high-rescanning probe microscope scanner has the advantages of being simple in structure, stable in working height and extremely small in return difference. With the independent low-return-difference and high-rescanning probe microscope scanner, the scanning probe microscope which can perform scanning imaging at a low voltage by only using the small-size XYZ piezoelectric scanning tube is manufactured for the first time, and the problem that in the prior art, the two favorable conditions can not be taken into consideration is solved. Besides, by using the independent low-return-difference and high-rescanning probe microscope scanner, the scanning probe microscope which can display the same high quality atomic resolution images as well in the absence of sound insulation and vibration reduction can be manufactured.

Description

technical field [0001] The invention relates to a scanning structure of a scanning probe microscope, in particular to an independent scanner of a scanning probe microscope with low hysteresis and high repetition, belonging to the technical field of scanning probe microscopes. Background technique [0002] It has been nearly 30 years since the first scanning probe microscope (SPM) came out. Because of its excellent atomic resolution ability and wide range of measurement applications, it has been actively used in the most advanced fields of scientific research. cutting edge. However, all current designs do not solve the stability problem of SPM very well, and it is still necessary to rely on external auxiliary equipment (such as sound insulation and noise reduction, damping and shock absorption, etc.) to obtain atomic resolution images. [0003] The core components of the scanning probe microscope are the coarse approximation motor and the scanner. The coarse approximation mo...

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Problems solved by technology

[0006] Purpose of the present invention: In order to solve the problem of large hysteresis of the independent scanner of the existing scanning probe microscope, so that the independent scanner of the scanning probe microscope can still control the imaging with a low voltage when using a small-sized XYZ piezoelectric scanning tube, it is proposed A Low Hysteresis and High Repetition Scanning Probe Microscope Independent Scanner Structure

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