Servo motor driven large displacement vibration device and method
A technology of servo motor and vibration device, which is applied in the direction of fluid using vibration, can solve the problems of low frequency response, small displacement and large noise, and achieve the effect of good low frequency characteristics, low noise, good support and guiding effect
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[0013] Such as figure 1 As shown, the servo motor-driven large-displacement vibration device includes a motion table body and a vibration controller 11, and the motion table body includes a base 1, a servo motor 2, a first ball screw 3, a second ball screw 4, and a table 5 , the first static pressure guide rail 6, the second static pressure guide rail 7, the third static pressure guide rail 10, the acceleration sensor 8, the displacement sensor 9; the base 1 is provided with a servo motor 2, the first static pressure guide rail 6, the second static pressure guide rail The static pressure guide rail 7, the third static pressure guide rail 10, and the displacement sensor 9 are connected by bolts, and the first ball screw 3 and the second ball screw 4 are installed on the rotating shaft of the servo motor 2 through gear transmission. The bottom of 5 is provided with the first static pressure guide rail 6, the second static pressure guide rail 7, the slider of the third static pre...
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