Optical fiber and optical electronic device vertical coupling method

Abstract

The invention discloses an optical fiber and optical electronic device vertical coupling method. The method comprises the steps that the surface of an optical electronic device is pre-coated by a layer of photoresist; an aligning hole array is formed in the surface of the optical electronic device through the photolithography; coating layers on the end portions of optical fibers are stripped to expose optical fiber inner cores; under the assistance of a microscope and a displacement platform, the optical fiber inner cores exposed out of the end portions of the optical fibers are inserted into aligning holes and fixed through colloid. The optical fiber and optical electronic device vertical coupling method is particularly applicable to optical fiber coupling output of optical electronic devices like single-photo sources which are small in light area and in need of spatial isolation, and has the advantages of being high in spatial resolution ratio and simple and reliable in technology.

Description

technical field [0001] The invention belongs to the technical field of semiconductor materials and devices, and relates to a method for vertically coupling optical fibers and optoelectronic devices based on SU-8 alignment holes. Background technique [0002] An important prerequisite for the application of optoelectronic devices is the coupling output with optical fibers. Among them, vertical emitting devices have been widely promoted as light sources due to their advantages such as arraying, low driving current, easy industrial production, low divergence angle, and good far-field symmetry. Traditional fiber coupling technologies include V-shaped grooves, optical waveguides, and coupling fixtures, but there are various limitations such as complex processes, difficult alignment, and limited range of applicable devices. In particular, for the coupling output of quantum dot single photon source devices and optical fibers, since the size of self-organized quantum dots is only te...

AI Technical Summary

Problems solved by technology

Traditional fiber coupling technologies include V-shaped grooves, optical waveguides, and making coupling fixtures, etc., but there are various limitations such as complex processes, difficult alignment, and limited range of applicable devices.

In particular, for the coupling output of quantum dot single photon source devices and optical fibers, since the size of self-organized quantum dots is only tens of nanometers, and the device size is on the order of microns, in order to isolate the single photon output of a single device from the pair of devices and optical fibers The quasi-precision puts forward new requirements, and the traditional coupling method is difficult to play a role

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