Large-stroke micro-drive precise two-dimensional worktable

Abstract

The invention discloses a large-stroke micro-drive precise two-dimensional worktable which is mainly composed of a base, an X-direction feeding device, a Y-direction feeding device and a feeding device top worktable surface, wherein the X-direction feeding device and the Y-direction feeding device are mutually perpendicular in a two-dimensional plane, the Y-direction feeding device is arranged above the X-direction feeding device, the X-direction feeding device comprises an X-direction large-stroke feeding device and an X-direction micro-feeding device, the Y-direction feeding device comprises a Y-direction large-stroke feeding device and a Y-direction micro-feeding device, and the Y-direction large-stroke feeding device is arranged above the X-direction micro-feeding device and can move along with feeding motion of the X-direction micro-feeding device. A transition connecting plate of the base is connected with a machine tool. Due to the fact that fine precision drive of the worktable is matched with large-stroke displacement output, output force is large, the resolution ratio of displacement is high, the range of the displacement is large, and the large-stroke micro-drive precision two-dimensional worktable has a wide application prospect. Due to cooperation of a cooling system, the large-stroke micro-drive precision two-dimensional worktable avoids the machining difficulty that the feeding precision is influenced by heat generated by long-time precise machining and heating.

Description

Technical field [0001] The invention relates to a super-magneto-driven micro-drive large-stroke precision two-dimensional worktable, which is mainly used in micro-feeding in the process of precision and ultra-precision machining, and in a mechatronics system to realize large-stroke feed while requiring precision In the case of small displacement feed. Background technique [0002] Traditional large-stroke precision workbenches generally use precision screw pairs and rolling (or sliding) guides, precision spiral wedge mechanisms, turbine-cam mechanisms, gear-lever mechanisms and other mechanical transmission displacement drives. Due to mechanical friction, gaps, crawling, etc., its motion accuracy and positioning accuracy are difficult to reach sub-micron or even nanometer level. To achieve sub-micron or even nano-level positioning, conventional driving and transmission methods are no longer suitable. [0003] At present, most of the ultra-precision micro-motion worktables that ar...

AI Technical Summary

Problems solved by technology

[0003] At present, most of the ultra-precision micro-motion worktables that are widely used in practice include flexible hinge mechanisms and use piezoelectric ceramics as driving elements. Characteristics such as damping, small stroke, and hysteresis of piezoelectric ceramics have a negative impact on the improvement of table performance

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