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Fe-Pt ferromagnetic sputtering target and method for producing same

A manufacturing method and sputtering target technology, which are applied in sputtering coating, inductance/transformer/magnet manufacturing, magnetic objects, etc., can solve problems such as abnormal discharge and generation of powder particles, so as to reduce the generation of powder particles, Effect of suppressing abnormal discharge

Active Publication Date: 2013-08-21
JX NIPPON MINING & METALS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] Such a magnetic recording layer is usually formed by a sputtering film-forming method, but generally when using a magnetron sputtering device to sputter a ferromagnetic material sputtering target containing a metal oxide, there is the following problem: Inadvertent detachment of oxides or voids contained in the target generates abnormal discharge as a starting point, resulting in powder particles (impurities attached to the substrate)

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0066] In Example 1, as the raw material powder, SiO with an average particle diameter of 1 μm was weighed in advance. 2 Powder and SnO with an average particle size of 1 μm 2 powder makes SiO 2 Powder is 95% by weight, SnO 2 The powder is 5% by weight, and it is mixed with a ball mill for 1 hour to prepare SiO 2 -SnO 2 Mix powder. The mixed powder was mixed with Pt powder with an average particle diameter of 3 μm and Fe powder with an average particle diameter of 3 μm by 24.80% by weight of Fe powder, 69.56% by weight of Pt powder, SiO 2 -SnO 2 The weight ratio of mixed powder 5.64% by weight is weighed so that the composition of the target is 50Fe-40Pt-10(SiO 2 -SnO 2 ) (mol%).

[0067] Next, the above-mentioned Fe powder, Pt powder and SiO 2 -SnO 2 The mixed powder was sealed in a 10-liter ball mill tank together with zirconia balls as a grinding medium, and mixed by rotating for 20 hours.

[0068] This mixed powder was filled in a carbon mold, and hot-pressed in...

Embodiment 2

[0078] In Example 2, as the raw material powder, SiO with an average particle diameter of 1 μm was weighed in advance. 2 Powder and SnO with an average particle size of 1 μm 2 powder makes SiO 2 Powder is 95% by weight, SnO 2 The powder is 5% by weight, and it is mixed with a ball mill for 1 hour to prepare SiO 2 -SnO 2 Mix powder. The mixed powder was mixed with Pt powder with an average particle size of 3 μm, Fe powder with an average particle size of 3 μm, Cu powder with an average particle size of 5 μm, and Cr powder with an average particle size of 3 μm. 2 o 3 The powder is 60.97% by weight of Fe powder, 14.20% by weight of Pt powder, 9.25% by weight of Cu powder, Cr 2 o 3 Powder 11.06% by weight, SiO 2 -SnO 2 The weight ratio of the mixed powder 4.52% by weight is weighed so that the composition of the target is 75Fe-5Pt-10Cu-5Cr 2 o 3 -5(SiO 2 -SnO 2 ) (mol%).

[0079] Next, the above-mentioned Fe powder, Pt powder, Cu powder, Cr 2 o 3 Powder and SiO 2 ...

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PUM

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Abstract

Provided is a ferromagnetic sputtering target, the composition of which is 5 to 50 mol% of Pt, 5 to 15 mol% of SiO2, 0.05 to 0.60 mol% of Sn, and Fe as the balance, wherein the above-mentioned Sn is contained in SiO2 particles (B) dispersed in a metal base (A). A non-magnetic particle dispersion-type ferromagnetic sputtering target is obtained that can control abnormal discharge of the oxide that is the source of particle generation during sputtering.

Description

technical field [0001] The present invention relates to a ferromagnetic material sputtering target used for forming a magnetic thin film of a magnetic recording medium, especially a magnetic recording layer of a hard disk using a perpendicular magnetic recording method, and relates to a sputtering target capable of suppressing the generation of particles during sputtering. Fe-Pt type ferromagnetic material sputtering target for abnormal discharge of objects. Background technique [0002] In the field of magnetic recording represented by hard disk drives, materials based on Co, Fe, or Ni, which are ferromagnetic metals, are used as materials for magnetic thin films that perform recording. For example, a Co—Cr type or Co—Cr—Pt type ferromagnetic alloy containing Co as a main component is used for the recording layer of a hard disk employing an in-plane magnetic recording method. [0003] In addition, in the recording layer of a hard disk employing the perpendicular magnetic r...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34B22F3/14C22C1/05C22C5/04C22C32/00C22C33/02C22C38/00G11B5/64G11B5/851
CPCB22F3/14B22F2009/043C22C5/04C22C32/0021C22C33/0278C22C38/00C22C38/002C22C38/008C22C38/16C23C14/3414G11B5/851H01F10/123H01F41/183C23C14/3407
Inventor 池田祐希高见英生
Owner JX NIPPON MINING & METALS CORP
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