A Four-mass Linear Vibration Silicon Micro Gyro Sensitive Device

Abstract

The invention belongs to a gyro sensitive device, in particular to a four-mass linear vibration silicon micro gyro sensitive device. A four-mass linear vibration silicon micro-gyro sensing device includes a sensitive structure, an upper sealing cap and a lower sealing cap respectively arranged on the upper and lower sides of the sensitive structure, and the sensitive structure includes four mass blocks. The remarkable effects of the invention are: avoiding the coupling error; offsetting the coupling torque on the base under the working state of the silicon micro-gyro sensitive device; and saving the processing cost.

Description

technical field [0001] The invention belongs to a gyro sensitive device, in particular to a four-mass linear vibration silicon micro gyro sensitive device. Background technique [0002] A gyroscope is a sensor device used to measure the rotational angular motion of an object relative to inertial space. The earliest gyroscope was developed by the French scientist L. Foucault by using the fixed axis of the high-speed rotating rigid body. It was used in the navigation field to replace the compass to provide azimuth reference. The gyroscope has been developed for more than 100 years. Now the gyroscope is an important sensor device and the core device of attitude control and inertial guidance. It is used in aircraft, missiles, aerospace, ship navigation, satellite control, automobile industry, Drilling detection and many other fields have very important applications. [0003] With the development of gyro technology, low-cost, small-volume, low-power consumption micromechanical ...

AI Technical Summary

Problems solved by technology

The existence of coupling error will seriously affect the accuracy of the gyro, such as affecting the stability of the gyro's zero bias, quick start and temperature adaptability, etc.

[0005] 2) The base is greatly affected by the coupling torque

At present, the single-mass or double-mass structure is commonly used. When the gyroscope is in the working state, the coupling torque on the base is relatively large, and the coupling torque on the base will affect the zero-bias stability of the gyroscope.

[0006] 3) High processing cost

The electrode leads of the silicon micromachined gyroscope are led out from the sensitive structure in the upper and lower directions respectively, and the upper and lower sealing cap support layers must be drilled, the processing technology is complicated and the cost is high

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