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Periodic-array local plasma resonance sensor

A plasmonic resonance, periodic array technology, applied in the field of nanophotonics sensing, can solve problems such as unfavorable detection, and achieve the effect of wide detection range and high adaptability of refractive index detection

Active Publication Date: 2013-06-19
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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Problems solved by technology

However, on units with certain structural features, due to the specific structural selection, the spectral response of the device has different responses to different polarization excitations, which is not conducive to efficient, convenient and fast detection.
Most sensing elements based on split ring resonance are subject to such constraints and can only work under limited operating conditions

Method used

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Embodiment Construction

[0028] see figure 1 and figure 2 As shown, the present invention provides a local plasmon resonance sensor of a periodic array, comprising:

[0029] A substrate 10, the material of the substrate 10 is a transparent medium or a semiconductor material, and its refractive index is n=1.3-1.6;

[0030] A plurality of sensor units 20 are arranged on the surface of the substrate 10 to form a periodic array structure, wherein each sensor unit 20 is a nanoscale split ring unit, and the nanoscale split ring unit is an asymmetrical three-segment opening structure. One side of the ring unit is a first opening 21, the upper part is a second opening 22, and the other side is a third opening 23. Each sensor unit 20 is a nanoscale split ring unit, and the split ring unit is a square structure, so Each of the openings is located at the center of one side of the opening, and the ends of the first opening 21, the second opening 22 and the third opening 23 are symmetrical or asymmetrical in pl...

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Abstract

The invention discloses a periodic-array local plasma resonance sensor. The sensor comprises a substrate and a plurality of sensor units which are arranged on the surface of the substrate to form a periodic array structure. The periodic-array local plasma resonance sensor has the advantages of high sensitivity of sensing, low resonance line width, high signal modulation depth and large-scale detection angle tolerance.

Description

technical field [0001] The invention relates to the technical field of nanophotonics sensing, in particular to a metal photonic crystal structure refractive index sensor device related to localized plasmon resonance, which is a periodic array of localized plasmon resonance sensors. Background technique [0002] Surface plasmon is a form of coupled resonance that occurs at the metal / dielectric interface, and groups of electrons collectively move back and forth on this interface. This wave is trapped near the interface, interacting with the plasma of electrons on the metal surface. Resonant interactions between electronic charges on metal surfaces and electromagnetic waves generate surface plasmons and lead to their quite unique properties. [0003] Localized surface plasmon resonance: For metal nanoparticles, surface plasmon waves will be localized near the boundaries of metal nanoparticles, forming localized surface plasmon resonance. Spatial localized surface plasmon reso...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/41
Inventor 宋国峰刘杰涛许斌宗胡海峰王立娜
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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