Piezoelectric ceramic direct-driving servo valve based on hydraulic micro-displacement amplification structure
A piezoelectric ceramic and hydraulic amplification technology, applied in servo motor components, fluid pressure actuating devices, mechanical equipment, etc., can solve the problems of small output displacement and large output force of piezoelectric ceramic drives, and solve the contradiction between stiffness and strength , Improve the output capacity, the effect of low machining accuracy
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[0018] The hydraulic micro-displacement amplifying piezoelectric ceramic direct drive valve of the present invention will be further described in detail below with reference to the drawings and examples.
[0019] The present invention designs a piezoelectric ceramic direct drive valve based on a hydraulic micro-displacement amplifying structure. The structure diagram is as follows figure 1 As shown, the servo valve mainly includes four parts: eddy current displacement sensor, power slide valve, hydraulic micro-displacement amplifying structure and piezoelectric ceramics.
[0020] figure 1 Among them, piezoelectric ceramic drives the large-area piston movement of the hydraulic micro-displacement amplification structure, and obtains an amplified displacement output proportional to the area ratio on the small-area piston, and drives the power slide valve spool to move. There is an eddy current displacement sensor at the other end of the power spool valve, which is used to collect the p...
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