Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Piezoelectric stack positioner with piezoelectric plates in different positioning directions stacked in turn

A piezoelectric sheet, stack positioning technology, applied in piezoelectric/electrostrictive/magnetostrictive devices, circuits, electrical components, etc., and can solve problems such as asymmetry

Inactive Publication Date: 2012-12-05
HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
View PDF3 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Purpose of the present invention: In order to solve the asymmetry of positioning in different positioning directions in the existing multi-dimensional piezoelectric stack positioner, a piezoelectric stack positioner in which piezoelectric sheets in different positioning directions are stacked in turn is proposed

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Piezoelectric stack positioner with piezoelectric plates in different positioning directions stacked in turn
  • Piezoelectric stack positioner with piezoelectric plates in different positioning directions stacked in turn
  • Piezoelectric stack positioner with piezoelectric plates in different positioning directions stacked in turn

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] Embodiment 1: Piezoelectric stack positioner with two piezoelectric sheets positioned in different directions stacked in turn

[0022] See attached figure 2 In this embodiment, the piezoelectric stack positioner in which two piezoelectric sheets positioned in different directions are stacked in turn includes an X positioning piezoelectric sheet 1 and a Y positioning piezoelectric sheet 2, and is characterized in that the X positioning piezoelectric sheet 1 and the Y positioning piezoelectric sheet Y positioning piezoelectric sheets 2 are alternately stacked and fixed into a stack structure, where the connection between X positioning piezoelectric sheets 1 is mechanical series and electrical parallel connection 4, and the connection between Y positioning piezoelectric sheets 2 is also mechanical series connection and electrical parallel connection 1.

[0023] The working principle of this embodiment is: since the X positioning piezoelectric sheet 1 and the Y positionin...

Embodiment 2

[0024] Example 2: Piezoelectric stack positioner made of tangential piezoelectric sheets with piezoelectric sheets positioned in two different directions stacked in turn

[0025] The X-positioning piezoelectric sheet 1 and the Y-positioning piezoelectric sheet 2 in the above-mentioned embodiment 1 may be tangential piezoelectric sheets (shear piezo plates).

Embodiment 3

[0026] Embodiment 3: Piezoelectric stack positioner with three piezoelectric sheets positioned in different directions stacked in turn

[0027] See attached image 3 In this embodiment, the piezoelectric stack locator in which the piezoelectric sheets positioned in three different directions are stacked in turns includes an X positioning piezoelectric sheet 1, a Y positioning piezoelectric sheet 2, and a Z positioning piezoelectric sheet 3, which is characterized in that X positioning piezoelectric sheet 1, Y positioning piezoelectric sheet 2, and Z positioning piezoelectric sheet 3 are stacked and fixed in turn to form a stack structure, wherein the connection between X positioning piezoelectric sheets 1 is mechanical series and electrical parallel connection 4, Y The connection between the positioning piezoelectric sheets 2 is also a mechanical series connection and an electrical parallel connection 4 , and the connection between the Z positioning piezoelectric sheets 3 is a...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a piezoelectric stack positioner with piezoelectric plates in different positioning directions stacked in turn. The piezoelectric stack positioner comprises X-positioning piezoelectric plates and Y-positioning piezoelectric plates and is characterized in that the X-positioning piezoelectric plates and the Y-positioning piezoelectric plates are alternately stacked and fixed to form a stack structure, wherein the X-positioning piezoelectric plates are in mechanical serial connection and in electrical parallel connection, and the Y-positioning piezoelectric plates are also in mechanical serial connection and in electrical parallel connection. X-positioning piezoelectric plates, Y-positioning piezoelectric plates and Z-positioning piezoelectric plates can be stacked and fixed in turn to form a stack structure, so that the piezoelectric stack positioner with piezoelectric plates in three positioning directions stacked in turn is formed. One-dimensional positioning piezoelectric stack positioners serve as loads mutually and identical in load, so that the piezoelectric stack positioner is completely symmetrical in positioning in different positioning directions, image distortion and temperature drift are fundamentally eliminated, positioning precision is improved, and specific advantages of the piezoelectric stack positioner are maintained.

Description

technical field [0001] The invention relates to a piezoelectric positioner, in particular to a piezoelectric stack positioner in which piezoelectric sheets in different positioning directions are stacked in turn, and belongs to the technical field of piezoelectric positioners. Background technique [0002] Scanning probe microscope (SPM) has become an important scientific and technological strategic field in many fields such as nanotechnology, atomic manipulation, quantum control, molecular life science, materials and surface catalytic chemistry, etc. key tool. Its core component is a piezoelectric positioner (piezoelectric positioner) that can drive the probe to perform scanning motion relative to the sample surface in XY two directions (two dimensions) or XYZ three directions (three dimensions). The piezoelectric positioner that has been popular for many years is a piezoelectric tube scanner with four quadrants of outer electrodes evenly divided. The disadvantages of the...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): H01L41/083
Inventor 陆轻铀
Owner HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com