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Anti-bubble liquid control device

A technology of liquid control and air bubbles, applied in microscopes, optics, instruments, etc., can solve problems such as difficult to effectively control air bubble retention, reduce the reliability of the microscopic system, and sacrifice work efficiency, so as to avoid mutual penetration and diffusion, and achieve good reliability and adaptability, avoiding the effect of liquid extraction

Inactive Publication Date: 2014-07-09
FUZHOU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The method of dropping liquid on the observation area on the substrate first, and then moving the substrate to the bottom of the objective lens (for example, see Japanese patent JP2006243027A) can suppress the mixing of air bubbles to a certain extent, but it sacrifices work efficiency
[0007] 2) It is difficult to effectively control the bubble retention in the observation area
If bubbles appear in the liquid, they are easy to attach to the interface pollutants under the action of three-phase tension, which makes the bubbles exist for a long time and affects multiple observations, seriously reducing the reliability of the microscopic system
Adding the cleaning process of the objective lens after observation (for example, see Japanese patent JP2007065257A) will help to suppress pollution and reduce the retention of air bubbles, but it also reduces work efficiency and indirectly increases the cost of observation

Method used

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Embodiment Construction

[0025] The specific implementation of the present invention will be described below in conjunction with the drawings and examples.

[0026] figure 1 Schematically shows the assembly of the anti-bubble liquid control device and the lens group of the embodiment of the present invention, the anti-bubble liquid control device 3 arranged between the lens group 2 and the substrate 4 can be used in microscopic equipment such as an immersion microscope 1 application. In actual observation, the light on the surface of the substrate 4 (silicon wafer or liquid crystal substrate, etc.) is captured by related equipment for microscopic analysis through the liquid slit layer above the substrate 4 and the lens group 2 . For the consideration of equipment utilization and economy, immersion microscopic observation can have two modes: direct visual inspection and image analysis. If the wavelength of the observation light is visible light, it can be directly observed through the eyepiece 5; if ...

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Abstract

The invention discloses an anti-bubble liquid control device. The anti-bubble liquid control device is characterized by being arranged between a lens assembly and a substrate; a separation structure, a liquid seal belt and an auxiliary seal belt are arranged at the periphery of a liquid injection cavity and a recovering cavity, so that boundary bubbles are prevented from being generated while bubbles are brought away in the process of replacing maintenance liquid; liquid filled into the liquid injection cavity can be promoted to flow into the recovering cavity as much as possible through the separation structure; non-uniform liquid flow for promoting the liquid to gather inwards is applied at the periphery of the liquid injection cavity and the recovering cavity by the liquid seal belt according to the pressure distribution characteristic of a flow field, and the liquid seal belt has a leakage inhibition effect and a flowing traction effect; and the auxiliary seal belt is used for absorbing the liquid which can be leaked under the working condition of quick movement of the substrate and can apply certain liquid compensation to a boundary flow field. In addition, due to the application of the liquid which is the same as a medium in an observation area in the device, inter-infiltration and inter-diffusion among different fluid media can be prevented; and the device has high reliability and adaptability.

Description

technical field [0001] The invention relates to an anti-bubble liquid control device in an immersion microscope system, in particular to an anti-bubble liquid control device for an immersion microscope (Immersion Microscope). Background technique [0002] In industries such as semiconductors, fault analysis and reliability evaluation of tiny electronic devices are the key to ensuring yield. The usual way is to use the electronic device as a sample and observe it under a microscope to determine whether there are defects or impurities that affect the normal operation of the device. However, as the characteristic line width of electronic devices continues to shrink below 32 nanometers, and the size of substrates (such as semiconductor silicon wafers) continues to increase, the technical cost of traditional observation methods is rising rapidly. [0003] The immersion microscope system, by filling the gap between the front end of the objective lens and the substrate (such as si...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B21/33
Inventor 陈晖杜恒陈淑梅陈传铭
Owner FUZHOU UNIV
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