Anti-bubble liquid control device
A technology of liquid control and air bubbles, applied in microscopes, optics, instruments, etc., can solve problems such as difficult to effectively control air bubble retention, reduce the reliability of the microscopic system, and sacrifice work efficiency, so as to avoid mutual penetration and diffusion, and achieve good reliability and adaptability, avoiding the effect of liquid extraction
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[0025] The specific implementation of the present invention will be described below in conjunction with the drawings and examples.
[0026] figure 1 Schematically shows the assembly of the anti-bubble liquid control device and the lens group of the embodiment of the present invention, the anti-bubble liquid control device 3 arranged between the lens group 2 and the substrate 4 can be used in microscopic equipment such as an immersion microscope 1 application. In actual observation, the light on the surface of the substrate 4 (silicon wafer or liquid crystal substrate, etc.) is captured by related equipment for microscopic analysis through the liquid slit layer above the substrate 4 and the lens group 2 . For the consideration of equipment utilization and economy, immersion microscopic observation can have two modes: direct visual inspection and image analysis. If the wavelength of the observation light is visible light, it can be directly observed through the eyepiece 5; if ...
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