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Phase compensating method in object surface outline measurement

A technology of object surface and phase compensation, applied in the field of phase compensation, can solve the problems of random noise of phase distribution, and achieve the effect of low dependence, high robustness, and improved accuracy

Inactive Publication Date: 2012-06-20
SOUTHEAST UNIV
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Problems solved by technology

[0009] 2) The optical path of the measurement system is not an ideal optical path, which will bring random noise to the phase distribution
However, the performance of the commonly used preset digital device gamma value method and LUT method needs to be further improved

Method used

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  • Phase compensating method in object surface outline measurement
  • Phase compensating method in object surface outline measurement
  • Phase compensating method in object surface outline measurement

Examples

Experimental program
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Embodiment

[0038] Example: For object surface profile measurement systems using different structured light technologies, such as

[0039] 1) Phase shift method;

[0040] 2) Gray code + phase shift method;

[0041] 3) Single structured light grating method.

[0042] As long as the measurement system adopts digital equipment, including digital projectors and digital cameras, as tools for projecting structured light and collecting images, and adopts sinusoidal grating as the projection grating, the measurement system has system errors caused by gamma nonlinearity. The present invention can be used for the phase compensation of the above-mentioned object surface profile measurement system, and the specific embodiments are slightly different.

[0043] 1. Object surface profile measurement system based on phase shift method.

[0044] For the phase shift method using sinusoidal gratings of different frequencies, in the process of phase compensation and function creation, such as figure 1 The sinusoidal ...

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Abstract

The invention relates to a phase compensating method in object surface outline measurement. The phase compensating method comprises the following steps of: measuring an object surface outline on the basis of a structure light phase shift method, projecting a phase shift grafting towards a reference plane as a tested object by a digital projector, collecting the phase shift grafting projected on the reference plane by a digital camera to obtain image series; carrying out dephasing processing on the obtained image series according to the principle of a phase-shifting method, obtaining phase distribution representing the outline of the reference plane, selecting N phase data in an incrementing direction of the phase distribution as an actual phase distribution data set at random, subtracting known phase distribution of the phase shift grating from the actual phase distribution data set to obtain a phase compensating error data set; and carrying out curve fitting on the actual phase distribution data set and the phase compensating error data set by adopting sine and a function for carrying out phase compensation so that the measurement accuracy of an object surface outline measurement system is improved.

Description

Technical field [0001] The invention relates to a measurement technology of the surface profile of an object, in particular to a phase compensation method in the surface profile measurement of an object based on a structured light phase shift method. Background technique [0002] Object surface profile measurement is widely used in the fields of architecture, industrial manufacturing, biomedical engineering and reverse engineering. Structured light-based object surface profile measurement is an important branch. Among them, the object surface profile measurement using the phase shift method or the Gray code + phase shift method is widely used because of its fast measurement speed and high accuracy. [0003] The phase shift method uses n sinusoidal gratings with a phase shift relationship as the projection source image, and projects the n images to the measured object and collects them. The object surface profile measurement system obtains the 3D profile of the object surface by pr...

Claims

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Application Information

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IPC IPC(8): G01B11/25
Inventor 周平刘欣冉
Owner SOUTHEAST UNIV
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