SECS communication device and SECS communication method thereof

Abstract

An SECS communication device and an SECS communication method thereof are presented. The SECS communication device includes an SECS-II message communication part, a translation part, and an information storage device access part, and further includes at least one set of data structure files and a message format file for defining a message content and a message format of an SECS-II message. The translation part decodes the SECS-II message into data in various information storage formats of an information storage device according to the data structure file and the message format file, and encodes the data in various information storage formats of the information storage device into the SECS-II message, so as to enable message exchange between an EAP and the information storage device through the SECS communication device. By applying the SECS communication method, cost of program development is reduced, and meanwhile, high system stability and industrial efficiency are achieved.

Description

technical field [0001] The present application relates to a semiconductor device communication standard message exchange device and message exchange method, especially a message exchange device and message exchange method with semiconductor device communication function by modifying the setting file. Background technique [0002] Press, in order to make the semiconductor manufacturing process more efficient, semiconductor manufacturers use special communication protocols to control and manage semiconductor machines, such as: Semiconductor Equipment and Materials International (SEMI) The Equipment Communication Standards (SEMI Equipment Communication Standards, SECS) has become the communication standard used by the equipment in the semiconductor industry for automated production and production data collection. [0003] At present, in addition to the use of machine equipment in the semiconductor industry, communication standards for semiconductor equipment are also widely use...

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Problems solved by technology

[0004] However, this R&D method not only requires more time, money and labor costs for system development and testing, but also requires program designers with program development capabilities and SECS professional knowledge and practical experience

Secondly, the communication program developed through program code compilation is prone to potential errors in the initial stage, which will affect the stability of the production operation of the machine equipment

After the development is completed, the SECS communication program does not have sufficient extensibility and flexibility. That is to say, it is not easy to expand and modify the subsequent SECS communication functions, and developers must modify the program code of the communication program again. To achieve the purpose of expanding or modifying the communication function of SECS

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