Linear motor

Abstract

The invention provides a linear motor, belonging to the plate iron core linear motor technology field. The linear motor comprises a stator mechanism and a mover mechanism. The stator mechanism comprises a magnetic rail, a set of first magnet and a set of second magnet. The magnetic rail comprises a magnetic rail base plate, a first magnet fixing plate and a second magnet fixing plate. The mover mechanism comprises an iron core body, a set of first coil and a set of second coil. The linear motor is characterized in that: the first magnet fixing plate and a vertical plane of the magnetic rail base plate form a first included angle, the second magnet fixing plate and the vertical plane of the magnetic rail base plate form a second included angle, a first end plane of the first coil and a longitudinal center line of the iron core body form a third included angle, and a second end plane of the second coil and the longitudinal center line of the iron core body form a fourth included angle. The linear motor has the following advantages: thrust force can be realized, reasonable preload can be ensured, an ideal suction to thrust ratio is obtained, motion precision of a motion precision carried on the mover mechanism is raised, and generation of unwanted torsional force in motion is avoided.

Description

technical field [0001] The invention belongs to the technical field of flat-plate iron-core linear motors, and in particular relates to a linear motor, which is applied to manufacturing industries such as semiconductors, precision machine tools and precision measuring equipment. Background technique [0002] As known in the industry, high-speed and high-precision motion platforms driven by linear motors and mounted on movers are widely used in manufacturing industries such as semiconductor equipment, precision processing machine tools, and precision measuring equipment. Linear motors in the prior art mainly have the following three structural forms: one is a U-shaped coreless linear motor with a coil in the middle and magnetic tracks on both sides; The single-side magnetic track (also known as single magnetic track) flat iron core linear motor; the third is the bilateral parallel magnetic track flat iron core linear motor with parallel magnetic tracks on both sides. The sho...

AI Technical Summary

Problems solved by technology

It is not limited to the technical content disclosed in these documents, but it does not give any enlightenment on how to solve the technical problem of excessive suction between the iron core and the magnetic track during the movement of the widely used flat iron core linear motor

More specifically, the suction force between the iron core and the magnetic rail as the mover of the flat iron core linear motor in the prior art is about eight times of the working thrust during the motion process (working process), because the suction force greatly exceeds The preload of the motion platform is reduced, so that the size of the guide rail is huge, which is not cheap, and it will damage the service life of the guide rail

Images