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Analysis method for observing shape of powdery sample by scanning electron microscope

An electron microscope and analysis method technology, applied in the direction of material analysis by measuring secondary emissions, scanning probe technology, instruments, etc., can solve the problems of powder flying polluting the mirror column and affecting observation, and achieve good contrast and high The effect of sharpness

Inactive Publication Date: 2012-04-18
SHANGHAI FALAB TEST
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Problems solved by technology

[0008] In order to solve the problem of powder flying and polluting the mirror column when the vacuum system is vacuumed when the scanning electron microscope is used to observe the morphology of powder samples, thereby affecting the follow-up observation, the present invention proposes the following technical solutions:

Method used

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  • Analysis method for observing shape of powdery sample by scanning electron microscope
  • Analysis method for observing shape of powdery sample by scanning electron microscope
  • Analysis method for observing shape of powdery sample by scanning electron microscope

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Embodiment Construction

[0022] The preferred embodiments of the present invention are described in detail below, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, so as to define the protection scope of the present invention more clearly.

[0023] This example is for Al 2 O 3 The powder is subjected to morphology observation and analysis, and the specific operation steps are as follows:

[0024] A. Prepare the sample holder, and paste double-sided conductive copper glue on the holder;

[0025] B. Al 2 O 3 The powder sample was placed in a qualitative filter paper folded into a V shape, and the folded qualitative filter paper was shaken gently to make the Al 2 O 3 The powder sample slides down the surface of the conductive copper glue along the V-shaped groove;

[0026] C. Put the bracket and the powder sample in contact with the working table and vibrate several times, and use the inertia to mak...

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Abstract

The invention provides an analysis method for observing the shape of a powdery sample by a scanning electron microscope. The analysis method comprises the following steps of: A, preparing a sample bracket and sticking a double-faced conductive copper adhesive on the bracket; B, naturally scattering the powdery sample on the surface of the copper adhesive; C, making the bracket together with the powdery sample in integral contact with a work operation table-board and vibrating several times; and naturally sticking one part of the powder with the copper adhesive by utilizing inertia; D, sufficiently blowing to wipe the bracket and the powder stuck on the bracket by utilizing a nitrogen gun so as to leave less powder with strong adherence with the copper adhesive; E, carrying out gold-plating treatment on the sample; and F, observing by using the scanning electron microscope. The analysis method provided by the invention has the advantages that: the powdery sample can be efficiently and safely observed by the scanning electron microscope with the method and a high-definition and good-contrast secondary electronic image of the scanning electron microscope can be obtained.

Description

[0001] technical field [0002] The invention relates to the field of shape analysis of materials, in particular to an analysis method for observing the shape of a powder sample by using a scanning electron microscope. [0003] Background technique [0004] With the continuous reduction of the size of devices and defects, ordinary optical microscopes can no longer be observed, so scanning electron microscopes have become a necessary tool. Its general principle is: the electron beam emitted from the cathode of the electron gun is affected by the accelerating voltage between the cathode and anode, shoots to the lens barrel, and shrinks into an electron probe through the convergence of the condenser lens and the objective lens. Under the action of the scanning coil on the upper part of the objective lens, the electron probe scans the surface of the sample in a raster pattern and excites various electronic signals. These electronic signals (such as secondary electrons SE...

Claims

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Application Information

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IPC IPC(8): G01Q30/20G01Q30/02G01N23/22
Inventor 张涛
Owner SHANGHAI FALAB TEST
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