Permanent magnet low-frequency multidegree of freedom vibration isolation mechanism based on negative stiffness principle

Abstract

A permanent magnet low-frequency multidegree of freedom vibration isolation mechanism based on the negative stiffness principle comprises a lower permanent magnet, an upper permanent magnet, a rubber sheet, a lower permanent magnet fixing plate, a rubber fixing seat, an upper permanent magnet fixing plate, a rubber pressure block and a rubber sheet edge fixing pressure ring, wherein the permanent magnets are magnetized in the vertical direction and opposite for same poles. A positive stiffness system is formed by the permanent magnets under the action of repulsive force, the rubber sheet is stretched to a negative stiffness system under the action of repulsive force of the permanent magnets, two systems are combined to form a low-frequency vibration isolation mechanism, the single vibration isolation mechanism can realize three degrees of freedom low-frequency vibration isolation, and three or four systems are combined in parallel to realize the six degrees of freedom low-frequency vibration isolation. The vibration isolation mechanism can be used in vacuum without the input of external energy. The vibration isolation mechanism has the characteristics of simple structure, low cost and easy processing, and can be used in the fields like optics, acoustics, biology, advanced manufacturing equipment, semiconductor manufacturing and precision measurement, etc.

Description

technical field [0001] The invention is mainly used for low-frequency vibration isolation of small and medium-sized instruments and equipment in the fields of optics, acoustics, advanced manufacturing equipment, semiconductor manufacturing, precision measurement and ultra-precision, and has broad application prospects for vibration isolation of instruments and equipment in vacuum. Background technique [0002] In the field of ultra-precision, precision and ultra-precision machining have increasingly stringent environmental requirements, because vibration interference inside and outside mechanical equipment is one of the important factors that reduce machining accuracy and surface quality. The quality of ultra-precision machining is not only related to the amplitude of vibration interference, but also related to the frequency of vibration interference. The vibration frequency that has an adverse effect on ultra-precision machining is a slight vibration in the range of 0.5-70Hz...

AI Technical Summary

Problems solved by technology

Since Platus proposed the principle of negative stiffness, in recent years, various vibration isolators have been developed by applying the principle of negative stiffness at home and abroad. Although the vibration isolation performance has been improved, their bearing capacity is small.

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