Reflecting type inverse compensator

Abstract

The invention discloses a reflecting type inverse compensator which is used for calibrating an aspheric surface zero detection compensator and comprises an interferometer, a lens, a negative lens and a reflecting spherical mirror, wherein an aspheric surface zero detection compensator to be calibrated is arranged between the interferometer and the lens; the negative lens is arranged between the reflecting spherical mirror and the lens; the lens is used for calibrating a high-level spherical aberration, and the negative lens is used for generating a quantitative spherical aberration; after a light ray passes through the negative lens and lens twice, the sum of the spherical aberration generated by the negative lens and the lens and a theoretical spherical aberration of the aspheric surfacezero detection compensator have the same size but opposite symbols; a single-wavelength diverging spherical wave emitted by the interferometer passes through the aspheric surface zero detection compensator to form a diverging spherical wave; the diverging spherical wave with a spherical aberration passes through the lens and negative lens in turn to reach the reflecting spherical mirror; a beam is reflected by the reflecting spherical mirror, and passes through the negative lens and the lens for the second time, and passes through the aspheric surface zero detection compensator and reaches the interferometer; and the interferometer detects the system aberration of the aspheric surface zero detection compensator.

Description

technical field [0001] The invention relates to a catadioptric inverse compensator for calibrating an aspherical zero-detection compensator, which is mainly used for calibrating the aspheric zero-detection compensator. Background technique [0002] Aspheric surfaces play an important role in optics. In most large optical systems, the primary mirrors are aspherical, especially secondary aspheric surfaces. But so far, it is much more difficult to manufacture aspheric surfaces than spherical surfaces. The important reason is that the detection of aspheric surfaces is much more difficult than that of spherical surfaces. [0003] The current main means of inspection of large-aperture aspheric mirrors is the zero-detection compensator, and the representative zero-detection compensator is the Offner compensator. Because the detection accuracy of this method is high, and the diameter of the compensator is much smaller than the diameter of the aspheric mirror to be tested, it is mor...

AI Technical Summary

Problems solved by technology

[0007] The technical problem to be solved by the present invention is: compared with the shortcomings of the existing aspheric compensator calibration method CGH accuracy, poor contrast, difficult production, etc., the purpose of the present invention is to provide a low production cost, the main error source can be precisely measured, A catadioptric inverse compensator with good contrast and simple fabrication for calibrating aspheric zero-detection compensators

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