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Method of electron diffraction tomography

A technology of electron diffraction and tomography, applied in material analysis using radiation diffraction, material analysis using wave/particle radiation, circuits, etc., can solve problems such as small interactions

Inactive Publication Date: 2012-01-11
FEI CO
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The disadvantage of X-ray crystallography is that the size of the crystals must be rather large, e.g. 0.1 μm or larger, because of the small interaction between the crystal and the X-ray beam
[0016] The disadvantage of the described method is that not all TEMs are equipped with a scanning unit, as a result not all TEMs can be operated in STEM mode

Method used

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  • Method of electron diffraction tomography
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Embodiment Construction

[0067] figure 1 The optical elements of a TEM for carrying out the method according to the invention are schematically shown.

[0068] figure 1 An electron source 100 is shown for generating an energetic electron beam 102 along an electron-optical axis 104 , for example with an energy of 50 to 400 keV.

[0069] Note that in reality, the location where the beam is focused (crossovers shown) is different from where it is drawn - and thus the angle and linear magnification are different, but these intersections are used to limit the beam diameter.

[0070] Note also that electron microscopes using lower and higher beam energies are known. Note that there may be one or more lenses located between the electron source and the aperture as well as alignment coils to center the beam on-axis. Condenser lenses 108 and 110 are used to form a beam at a sample position 112 . The diameter of the beam at the sample location is governed by the aperture 106 . The sample is placed on said s...

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Abstract

Discloded is a method of electron diffraction tomography. The invention relates to a method for electron diffraction tomography in a Transmission Electron Microscope. Known methods involve using Scanning Transmission Electron Microscope, and use the scanned beam for STEM diffraction. The invention proposes to form the diffraction patterns with a stationary beam 200 with a diameter slightly larger than the crystal, as a result of which a TEM without STEM unit can be used. Finding the crystal is done in TEM mode. Advantages of the method according to the invention are: a TEM without scanning unit can be used, and the diffraction volume is not depending on the orientation of the crystal, as the whole crystal is illuminated while obtaining the diffraction pattern.

Description

technical field [0001] The present invention relates to a method for determining the crystal structure of a crystal by electron diffraction tomography using an electron microscope equipped to irradiate the crystal with an electron beam, the method comprising: [0002] ? provide a sample with one or more crystals in it, [0003] ? Identify the crystals to be analyzed on the sample, [0004] ? Record the diffraction tilt sequence of the crystal by repeatedly doing the following [0005] ○ Tilt the sample to a known tilt angle relative to the beam, [0006] ○ center the crystal relative to the beam, and [0007] ○ record the diffraction pattern of the crystal at the tilt, [0008] ? And to determine the crystal structure by analyzing the recorded diffraction patterns. Background technique [0009] This method is known from "Towards automated diffraction tomography: Part I-Data acquisition", U. Kolb et al., Ultramicroscopy 107 (2007) 505-513. [001...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N23/20G01N23/205
CPCH01J37/265G01N2223/418G01N2223/32G01N2223/419H01J2237/2611G01N23/20058H01J37/295G01N2223/309G01N2223/3306H01J2237/26H01J2237/20207G01N2223/102G01N2223/612
Inventor H.何A.福伊格特
Owner FEI CO
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