Vertical laminar flow system of microenvironment
A micro-environment, laminar flow technology, applied in electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve problems such as unfavorable overall area, local micro-environment cannot achieve cleanliness, control, etc., and achieve the effect of convenient control
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[0032] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
[0033] like figure 1 Shown is a schematic diagram of an embodiment of the vertical laminar flow system of the microenvironment of the present invention, which includes a cuboid-shaped chamber, a fan module 1, a flow guiding device 2, a flow equalizing device 5, a filter module 6, and the like.
[0034] The fan module 1 passes through the hoisting unit 7 (such as Figure 2a Shown) the fan hoisting screw rod (also can be rope) 8 is arranged on the inner top surface (ceiling) or inner side of chamber. There can be one or more centrifugal fans arranged in the fan module 1 . The air volume at the air inlet is uniformly controlled by the fan module 1 in the whole area, and th...
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