Dual-wavelength phase-shift interference-based method for measuring optical heterogeneity
A phase-shift interference and non-uniformity technology, which can be used in testing optical performance and other directions, and can solve problems such as inability to deduct system errors, high requirements for adjustment and reset accuracy, and impact on measurement accuracy.
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[0050] The measurement method of the present invention is applicable to a variety of interferometer structures. For simplicity and convenience, only a Twyman-Green interferometer with two lasers with different wavelengths or a wavelength-tunable laser is used as an example. The principle structure of the Tieman Green interferometer is as follows: figure 1 As shown, it includes a laser 1, a laser 2, an electronic shutter 3, an electronic shutter 4, a mirror 5, a light combining mirror 6, a beam expander and collimator 7, a beam splitter 8, a standard mirror 9, a phase shifter 10, and Test sample 11, standard mirror 12, imaging system 13, area array photodetector 14 and computer 15. The electronic shutter 3 and the electronic shutter 4 are opened or closed by the microcomputer under the control of the measurement program. When the electronic shutter 3 is opened and the electronic shutter 4 is closed, the laser beam of the laser 1 is emitted. When the electronic shutter 3 is cl...
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