Silica source flask

Abstract

The invention provides a silica source flask, comprising a source flask body, an inlet air pipe, an outlet air pipe, an inlet control valve and an outlet control value, wherein the inlet control valve and the outlet control valve are arranged upper ports of the inlet air pipe and the outlet air pipe respectively; a bottom wall of the source flask body is funnel-shaped and an external wall of the source flask body extends to the lowest part of the funnel-shaped bottom wall so as to form a supporting wall; and the pipe body of the inlet air pipe passes through the funnel-shaped bottom wall by an internal cavity of the source flask body and then the lower port of the inlet air pipe is communicated with an outlet of the funnel-shaped bottom wall. In the novel silica source flask, the bottom wall of the source flask is of a funnel-shaped structure, so that nitrogen enters into fluids from bottom to top, thus not only lengthening the operating stroke of the gas and improving the uniformity of mixed steam concentration to cause the upper mixed gas to be more saturated and stable, but also solving the problem of excess residual fluids after the use of the source flask is over, thus avoiding wastes.

Description

【Technical field】 [0001] The invention relates to a quartz source bottle for containing toxic chemicals such as phosphorus oxychloride, which is used in the production process of solar cells in the IT industry. 【Background technique】 [0002] In the production process of solar cells, a diffusion process is involved, that is, a thin phosphorus layer is penetrated on the surface of P-type silicon to make the surface become N-type and become a PN junction. The basic principle is that the phosphorus oxychloride (POCL3) solution is carried into the diffusion furnace tube through the gas (usually nitrogen gas), so that it reacts to form phosphorus and precipitates on the surface layer, and the phosphorus penetrates into the interior of the silicon wafer at high temperature to form the N zone. [0003] figure 1 Shown is the quartz source bottle structure that is used to contain phosphorus oxychloride in the prior art, and it is made of quartz glass source bottle body e, air inlet...

AI Technical Summary

Problems solved by technology

In the practical application of the quartz source bottle of this structure, there is the following problem: with the gradual reduction of the POCL3 liquid volume in the reaction process, when the liquid level f drops to the minimum effective reaction liquid level g, the remaining liquid will no longer participate in the reaction. Therefore, after the use of this source bottle, there will still be a lot of POCL3 liquid in the bottle, which will be wasted due to its high price and inability to be reused

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