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Differential mobility analyzer, particle measuring system, and particle sorting system

A technology of electric mobility and grading devices, which is applied in the direction of measuring devices, analytical materials, particle size analysis, etc., can solve the problems of decreased transportation efficiency, inability to obtain particle size distribution, and unresolved problems

Active Publication Date: 2014-05-07
折井孝彰
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In particular, the smaller the particle size of the aerosol particles, the more likely it is to be affected by the drop in transport efficiency depending on the particle size, such as diffusion deposition.
As a result, there is a problem that an accurate particle size distribution cannot be obtained without correcting the influence due to diffusion deposition, etc.
However, there is a problem that the accuracy of the results cannot be expected especially for relatively highly volatile substances because the aerosol particles stay at the joint connecting the two DMAs for a relatively long time.
However, the two issues stated have not been resolved

Method used

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  • Differential mobility analyzer, particle measuring system, and particle sorting system
  • Differential mobility analyzer, particle measuring system, and particle sorting system
  • Differential mobility analyzer, particle measuring system, and particle sorting system

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0062] according to figure 1 and figure 2 , and one embodiment of the DMA of the present invention will be described as follows.

[0063] (Configuration of DMA100)

[0064] First, use figure 1 The outline of the configuration of DMA 100 according to the present invention will be described. figure 1 It is a cross-sectional view schematically showing a cross-section of the DMA 100 cut on a plane perpendicular to each slit (described later).

[0065] Such as figure 1 As shown in (a) and (b), the DMA 100 of this embodiment is generally a device for classifying charged particles (charged particles) based on electric mobility, and includes a classifying tank 101, a sheath gas supply device 110 and voltage sources 108,109.

[0066] The classification tank 101 is a rectangular parallelepiped-shaped insulating frame. In the classification tank 101 , an inlet electrode 103 , an intermediate electrode 105 , and an outlet electrode 107 (three electrodes) are arranged in this o...

Embodiment approach 2

[0116] if according to image 3 Another embodiment of the DMA of the present invention will be described as follows. image 3 (a) and (b) are cross-sectional views schematically showing a cross-section of DMA 300 cut on a plane perpendicular to each slit. In addition, for the sake of convenience of description, components having the same functions as the components of DMA 100 according to Embodiment 1 are denoted by the same reference numerals, and description thereof will be omitted. In this embodiment, differences from Embodiment 1 will be mainly described.

[0117] (Configuration of DMA300)

[0118] Such as image 3 As shown, DMA 300 differs from DMA 100 in Embodiment 1 only in the configuration of the second classification unit and its surroundings. Specifically, in DMA 300 , instead of exit electrode 107 in DMA 100 , exit electrode 107 a having exit slit 106 a formed at the same height as entrance slit 102 is provided. Furthermore, the second classification part 20a ...

Embodiment approach 3

[0131] if according to Figure 4 Still another embodiment of the DMA of the present invention will be described as follows. Figure 4 (a) and (b) are cross-sectional views schematically showing a cross-section of DMA 400 cut on a plane perpendicular to each slit. In addition, for the convenience of description, the components having the same functions as those of the DMA 100 according to Embodiment 1 are denoted by the same reference numerals, and their descriptions are omitted. In this embodiment, differences from Embodiment 1 and Embodiment 2 will be mainly described.

[0132] (Configuration of DMA400)

[0133] Such as Figure 4 As shown, DMA 400 differs from DMA 100 in Embodiment 1 only in the configuration of the second classification unit and its surroundings. Specifically, in DMA400, instead of the exit electrode 107 in DMA100, exit electrode 107b is provided, and this exit electrode 107b has two exit slits 106a, 106 at different heights. Furthermore, the second cla...

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Abstract

In order to provide a differential mobility analyzer and the like that allows (i) easy increase of an upper limit of particle size of charged particle which can be classified and (ii) analysis of charged particles whose particle size is variable, a DMA (Differential Mobility Analyzer) includes: a classification tank in which an inlet electrode having an inlet slit, an intermediate electrode having a slit, and an outlet electrode having an outlet slit are arranged in sequence in such a manner that adjacent electrodes are disposed opposing each other at predetermined intervals; a gas supply section supplying the classification tank with sheath gas; and a voltage generator applying a predetermined voltage between the electrodes disposed opposing each other, the classification tank including a first classification section and a second classification section each formed by the electrodes disposed opposing each other, and the gas supply section controlling a flow rate of the sheath gas to be supplied to the classification tank individually per first classification section and second classification section.

Description

technical field [0001] The invention relates to a differential electric mobility classification device, a particle measuring system equipped with the device and a particle screening system equipped with the device. Background technique [0002] In recent years, fine particles such as dust and mist suspended in gaseous environments have attracted attention in connection with the suppression of particle pollution in the semiconductor manufacturing process, the development of quantum nanomaterials, or the elucidation of the generation mechanism of acid rain and smog in the atmosphere. [0003] As a method for classifying aerosol particles with particle diameters from nanometer to micrometer, a Differential Mobility Analyzer (DMA, Differential Mobility Analyzer) utilizing the phenomenon that the electric mobility of charged particles in the airflow depends on the particle diameter is used. ) are applied, and among them, a cylindrical differential mobility classifier (CDMA, Cylin...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/62G01N15/02G01N27/622
CPCG01N2001/2223G01N15/0266G01N2015/0038G01N2015/0288G01N2015/0046
Inventor 折井孝彰工藤聪
Owner 折井孝彰
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