Vacuum air pumping device

Abstract

A vacuum air pumping device comprises a vacuum chamber, a vacuum pump and a getter, wherein the getter is used for heating at high temperature and activating so as to obtain and maintain the vacuum degree of a container; the container for accommodating the getter is a getter accommodation chamber which is independently arranged between the vacuum chamber and the vacuum pump; and the getter accommodation chamber is respectively communicated with the vacuum chamber and the vacuum pump. When the vacuum air pumping device is in use, only part of the getter is heated and the vacuum chamber and devices inside the vacuum chamber are not heated; and the vacuum air pumping device has the advantages of favorable sealing effect, convenience in mounting, use and replacement, small size, and simple structure..

Description

technical field [0001] The invention relates to a suction device, in particular to a vacuum suction device with a high-temperature activated getter. Background technique [0002] Getters play a very important role in electric vacuum devices, vacuum technology, atomic energy industry and other scientific research and production. Especially in the electric vacuum device, it can not only make the device obtain the required vacuum degree, but also make the device maintain a certain vacuum degree, so as to ensure the stability and reliability of the electric vacuum device. The commonly used structure for placing the getter is that the getter and the device are placed together in a vacuum chamber that needs to maintain a vacuum; when the getter is activated at high temperature, the entire vacuum chamber is baked at a high temperature. For example, the micro-device assembly disclosed in the Chinese invention patent with the patent number "ZL200480007790.0" and the name "micro-devi...

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Problems solved by technology

For example, the micro-device assembly disclosed in the Chinese invention patent with the patent number "ZL200480007790.0" and the name "micro-device assembly with a fine-grained getter layer for maintaining vacuum", such as figure 1 as shown, figure 1 It is a schematic structural diagram of a vacuum chamber with a getter in the prior art. It can be seen from the figure that both the getter 10C and the electric vacuum device 10B are arranged in the vacuum chamber 10A, and when the getter 10C in the vacuum chamber 10A is activated, it is necessary to The entire microdevice assembly 100A is heated, which may cause damage to the electric vacuum device 10B when the getter 10C is activated at high temperature

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