High-precision diagnostic equipment collimation method and device thereof

Abstract

The invention provides a high-precision diagnostic equipment collimation method and a device thereof, and aims to solve the problems of low collimation precision, complex collimation device and limited space in the traditional collimation method. The method comprises the following steps: imaging a target point on two sets of CCDs (Charge Coupled Devices) in an optical imaging convergence measurement mode; interpreting the two sets of CCD images to obtain CCD convergence measuring point coordinates; when the CCD convergence measuring point coordinates coincide with the initialization-given target point coordinates, indicating that the diagnostic equipment strictly points to the target point, which means collimated; and when the CCD convergence measuring point coordinates do not coincide with the initialization-given target point coordinates, adjusting the degree of freedom of the diagnostic equipment collimation structure in three directions according to the CCD convergence measurement model established during initialization until the CCD convergence measuring point coincides with the target point. The invention has high collimation precision up to 5-10 mu m; and the system can judge whether the diagnostic equipment is collimated without a target monitoring system for observing the collimation condition of the collimated target point, so that the invention is convenient for use.

Description

technical field [0001] The invention relates to a method and device for aiming high-precision diagnostic equipment. Background technique [0002] In order to ensure that the diagnostic equipment is aimed at the target point, the diagnostic equipment has an aiming device. Different aiming methods determine the accuracy and performance of aiming. Common aiming methods mainly include: single laser beam aiming, double laser beam intersection aiming. [0003] A single laser beam aiming method such as figure 1 As shown, the laser beam is coaxial with the optical axis of the optical system. When the laser beam points to the target point, it means that the optical axis of the measurement system points to the target. This method does not occupy the external space, but it needs to occupy the light hole, so the application is limited. [0004] Double laser beam intersection and aiming: the aiming is completed by two laser focusing and emitting devices through intersection. The las...

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Problems solved by technology

[0006] The present invention aims to provide a method for aiming high-precision diagnostic equipment to solve t

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