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Scanning method for measuring solid particle membrane with scanning electron microscope

A scanning electron microscope and scanning method technology, applied in the field of metrology, can solve the problems of easy repeated scanning, excessive deviation, and no uniform coverage of the film, and achieve the effect of avoiding repeated scanning, high repeatability and accuracy

Inactive Publication Date: 2011-01-19
航空工业总公司过滤与分离机械产品质量监督检测中心
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage of the above-mentioned scanning method is that the scanning field of view is too concentrated, and the field of view distributed in the central area of ​​the diaphragm is large, while the field of view distributed in the peripheral area is small, and the entire diaphragm is not evenly covered. Once the solid particles on the diaphragm are distributed The uniformity is not enough, which will cause the deviation between the statistical counting result and the actual total number of particles on the diaphragm to be too large or too small
Its disadvantages are: the same area is easy to scan repeatedly, and the repeatability and accuracy of statistical counting results are poor

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0018] Example 1, measuring a solid particle membrane with a relatively dense particle distribution.

[0019] 1. Fix the diaphragm on the stage of the scanning electron microscope, adjust the working distance to 15mm, the accelerating voltage to 20kV, the vacuum degree to 20kPa and the beam spot to 60, so that the scanning electron microscope can clearly display the particle morphology image.

[0020] 2. Determine the scanning area and scanning field of view of the scanning electron microscope: divide the scanning area into the following three parts: the first scanning area is the central circle, the center of the central circle is the center of the diaphragm, and the diameter of the central circle is 6mm; the second The scanning area is the first circular ring concentric with the central circle, the inner diameter of the first circular ring is 6 mm, and the outer diameter is 12 mm; the third scanning area is the second circular ring concentric with the central circle, the inne...

Embodiment 2

[0024] Example 2, measuring a solid particle membrane with relatively sparse particle distribution.

[0025] 1. Fix the diaphragm on the stage of the scanning electron microscope, adjust the working distance to 15mm, the accelerating voltage to 20kV, the vacuum degree to 25kPa and the beam spot to 65, so that the scanning electron microscope can clearly display the particle morphology image.

[0026] 2. Determine the scanning area and scanning field of view of the scanning electron microscope: divide the scanning area into the following three parts: the first scanning area is the central circle, the center of the central circle is the center of the diaphragm, and the diameter of the central circle is 6mm; the second The scanning area is the first circular ring concentric with the central circle, the inner diameter of the first circular ring is 6 mm, and the outer diameter is 12 mm; the third scanning area is the second circular ring concentric with the central circle, the inner...

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Abstract

The invention belongs to the measuring technical field, and relates to improvement of a scanning method for measuring a solid particle membrane with a scanning electron microscope. The scanning method comprises the following steps: fixing the membrane and adjusting parameters of the scanning electron microscope; determining scanning areas and scanning fields of the scanning electron microscope; scanning a first scanning area; scanning a second scanning area; and scanning a third scanning area. The scanning method avoids rescanning the same area, thus achieving good repeatability and high accuracy of statistical counting results.

Description

technical field [0001] The invention belongs to the technical field of measurement, and relates to the improvement of a scanning electron microscope measuring solid particle membrane scanning method. Background technique [0002] When measuring and counting the size and distribution of micron-sized or even smaller irregular solid particles, optical microscopes are generally used for diaphragm scanning. The national standard GB / T 20082-2006 "Methods for measuring particle pollution by optical microscopes for hydraulic transmission liquid pollution" A scanning method for an optical microscope is specified in . The disadvantage of the above-mentioned scanning method is that the scanning field of view is too concentrated, and the field of view distributed in the central area of ​​the diaphragm is large, while the field of view distributed in the peripheral area is small, and the entire diaphragm is not evenly covered. Once the solid particles on the diaphragm are distributed If...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q10/00G01Q30/02
Inventor 杜立鹏高振萍金涛路红郝新友耿聪
Owner 航空工业总公司过滤与分离机械产品质量监督检测中心
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