A quantum cascade regular polygon microcavity laser and its manufacturing method

Abstract

The invention discloses a quantum cascade regular polygonal microcavity laser, comprising: a substrate of a quantum cascade epitaxial layer; a lower confinement layer located on the substrate; an active region / implantation region located on the lower confinement layer layer; an upper confinement layer, above the active region / implantation region; an upper cladding layer, including an ohmic contact layer; the lower confinement layer, the active region / implantation region, the upper confinement layer and the upper cladding layer The side walls are surrounded by an insulating layer which is surrounded by a front electrode layer. The invention also discloses a manufacturing method of a quantum cascade regular polygonal microcavity laser. The invention wraps the etched sidewall of the quantum cascade regular polygonal columnar microcavity laser with the SiO2 insulating layer and the Ti / Ag / Au electrode layer, which enhances the limitation of the light field in the microcavity and improves the quality factor of the mode in the microcavity , and the structure of the laser is simple, and the manufacturing process is convenient.

Description

technical field [0001] The invention relates to the technical field of semiconductor optoelectronic devices, in particular to a quantum cascade regular polygonal microcavity laser in the mid-to-far infrared band and a manufacturing method thereof. Background technique [0002] Semiconductor lasers in the mid-to-far infrared band are widely used in many fields such as air pollution monitoring, trace gas detection, molecular spectroscopy, and infrared interference. [0003] Quantum cascade lasers use micro-optical resonators, which have two main advantages. On the one hand, the gain of the quantum cascade material is low, while the microcavity laser has a small mode volume and a high mode quality factor, and a high quality factor is beneficial to the lasing of the quantum cascade laser. On the other hand, the inherent TM mode polarization of quantum cascade lasers prevents the loss perpendicular to the plane of the laser, which is especially suitable for whispering gallery mo...

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Problems solved by technology

The disadvantage of this method is that the stripping process with glue has great limitations, and the thickness of the evaporated metal film layer should not be too large, otherwise it will be difficult to peel off; the quality of the evaporated metal electrode film layer is not high

When the cylinder diameter is small, wire bonding becomes difficult, and testing with microprobe contacts also causes process inconvenience

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