Method and device for calibrating three-dimensional micro tactile sensor

Abstract

The invention discloses a method and a device for calibrating a three-dimensional micro tactile sensor. The method and the device are characterized in that: a three-dimensional micro tactile sensor fixing device, a micromovement input device, a CCD camera and a laser interferometer are arranged in a vibration isolation chamber; the three-dimensional micro tactile sensor is put on a rotary table through different clamping mechanisms; the micromovement input device realizes Z-axis coarse movement positioning of the three-dimensional micro tactile sensor and zero contact of the sensor and piezoelectric ceramics through a control device; the piezoelectric ceramics output amplitude signals to apply displacement constraint signals to the three-dimensional micro tactile sensor through a control system; an input-output relational graph is established through a signal acquisition system and computer software; and a calibration system of the laser interferometer tracks and measures the displacement constraint quantity of the piezoelectric ceramics so as to test and calibrate performance parameters of the three-dimensional micro tactile sensor. The method and the device calibrate performanceof the three-dimensional micro tactile sensor with multiple sensing modes, such as linearity, measuring range and precision.

Description

technical field [0001] The invention relates to a method for correcting an instrument, and particularly discloses a method and device for calibrating a three-dimensional micro-tactile sensor for measuring micron and nanometers. Background technique [0002] In recent years, fusion with semiconductor technology has become an important driving force for the development of sensors. This fusion makes the performance of the sensor more powerful, and the volume is getting smaller and smaller, which has led to the birth of miniature sensors. The emergence of micro-sensors makes it possible to apply sensor devices in many fields where sensors cannot be used, thus providing conditions for the intelligentization of system products. As a result, a large number of new micro- and nano-sensors have been spawned, which poses new challenges to the detection technology of micro- and nano-scale. Due to the singleness of the signal, the low precision and the limited ability to collect weak si...

AI Technical Summary

Problems solved by technology

Due to the singleness of the signal, low precision and limited ability to collect weak signals, conventional sensors can only calibrate the realization of conventional sensors for various calibration devices and methods.

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