Method and equipment for manufacturing solar battery
A technology of solar cells and manufacturing methods, applied in the direction of final product manufacturing, sustainable manufacturing/processing, circuits, etc., can solve problems such as degradation of solar cell performance and quality, impact on solar cell performance, waste of material and financial resources, etc., to avoid product Differences in performance and quality, improvement of performance and product quality, effects of eliminating contamination
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[0021] In order to enable those skilled in the art to better understand the technical solution of the present invention, the solar cell manufacturing method and equipment provided by the present invention will be described in detail below with reference to the accompanying drawings.
[0022] see figure 2 , the solar cell manufacturing method provided by the invention, comprises the following steps:
[0023] 101) Doping impurity atoms into the silicon wafer to form a PN junction.
[0024] Specifically, the required impurities are transported to the surface of the silicon wafer by means of a carrier gas for shallow diffusion. Here, the shallow diffusion refers to the diffusion of impurity atoms on the surface of the silicon wafer and in a relatively shallow depth range below the surface of the silicon wafer, usually the diffusion depth is only a few hundred nanometers. Then, with the help of high temperature treatment, the impurity atoms pre-attached at the shallow layer cont...
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