Electrical scanner device and laser machining apparatus having electrical scanner device

An electrical scanner and filter technology, applied in laser welding equipment, metal processing equipment, instruments, etc., can solve the problems of increasing processing cost, increasing manufacturing cost, reducing the efficiency of device assembly operation, etc. Effect

Active Publication Date: 2013-10-30
HITACHI SEIKO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, since the installation of the sensor on the rotating shaft will increase the processing cost and reduce the work efficiency of the device assembly
Therefore, increased manufacturing cost

Method used

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  • Electrical scanner device and laser machining apparatus having electrical scanner device
  • Electrical scanner device and laser machining apparatus having electrical scanner device
  • Electrical scanner device and laser machining apparatus having electrical scanner device

Examples

Experimental program
Comparison scheme
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Embodiment Construction

[0033] An embodiment of the present invention will be described below using the drawings.

[0034] figure 1 It is a control block diagram of the galvano scanner device related to the present invention.

[0035] First, the schematic configuration of the galvano scanner device will be described.

[0036] The rotary shaft 5 of the galvano scanner device 1 is supported by bearings 6a, 6b. On one end of the rotating shaft 5, the reflector 2 is fixed by the reflector holder 9, and two strain sensors 10a, 10b for detecting the amount of deformation of the reflector 2 are arranged on the back of the laser beam reflecting surface of the reflector 2. . In addition, since the strain sensors 10a and 10b have the same structure, they are simply referred to as the strain sensor 10 when there is no need to distinguish them. The strain sensor 10 outputs a strain detection signal 20 . The strain sensor 10 is a piezoelectric element such as PZT, a resistance wire strain gauge, or the like,...

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PUM

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Abstract

An object of the invention is to provide an electrical scanner device capable of positioning a reflector reflecting laser and the like beams with high-speed and high precision and laser machining apparatus having the electrical scanner device. An electrical scanner device has: a reflector (2) supported on the rotation axis (5); an angle detecting unit composed of an encoder board (7) supported on the rotation axis (5) and a transducer head (8) fixe3d on the frame (12b); a servo control device using the angle detecting value (14) detected by the angle detecting unit to make the reflector (2) tracking the angle target value, wherein a strain sensor (10) for detecting the deformation amount of the reflector (2) is provided on the reflector (2), and then the reflector (2) is positioned based on the output signal (20) of the strain sensor (10) and the output signal (14) of the angle detecting unit.

Description

technical field [0001] The present invention relates to a galvano-scanne device for positioning a mirror for reflecting a beam of laser light or the like at a desired angle, and a laser processing device having the galvano-scanner device. Background technique [0002] The galvano scanner device is a device that deflects the optical path of a laser beam by rotating a mirror mounted on a rotation axis with a built-in electromagnetic actuator and changing the angle of the mirror. In a laser processing device that is a representative device using a galvano scanner, a laser beam output from a laser oscillator is guided to a pair of galvano scanners corresponding to the X and Y directions of a printed circuit board as a workpiece. The mirror is deflected in two orthogonal directions, and the desired position of the printed circuit board is irradiated for perforation processing. Since the galvano scanner device needs to accurately position the mirror toward the target angle, an an...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B26/10B23K26/00
Inventor 关健太平井洋武广濑德晃远山聪一
Owner HITACHI SEIKO LTD
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