Special gas supply and distribution device
A technology for distributing equipment and special gases, applied in gas/liquid distribution and storage, mechanical equipment, piping systems, etc., to achieve the effects of reducing user costs, convenient system integration, and fast transmission speed
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[0011] Below in conjunction with embodiment further illustrate the present invention:
[0012] Such as figure 1 As shown, a special gas supply and distribution equipment consists of gas source supply equipment 1, valves 21-24, pressure sensors 31, 32, front filter 41, rear filter 42, overflow detector 5, test port 6. Pneumatic angle valve 7, vacuum generator 8, gas cylinder 9, and non-dead valve 10. The gas source supply equipment 1 is connected to the valve 21 through the delivery pipeline, and the pressure sensor 31 is connected to the delivery pipeline in between; the valve 21 is connected to the delivery pipeline Connect the valve 22 and the valve 23, and connect the front filter 41 and the flow detector 5 on the conveying pipeline in between; connect the valve 22 to the test port 6; The sensor 32; the pneumatic angle valve 7 is connected to the rear section filter 42; the valve 24 is connected to the vacuum generator 8; the valve 21 is connected to the gas cylinder 9, an...
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Abstract
Description
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Application Information
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