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Method for on-position detecting a light-permeable object and device for detecting

A detection method and a technology of a detection device, which are applied in the directions of measuring devices, optical device exploration, and the use of optical devices, etc., and can solve problems such as inability to detect the presence of multiple light-transmittable objects

Inactive Publication Date: 2008-06-18
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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Problems solved by technology

Although the above two methods can detect the presence of light-transmitting objects, when there are multiple light-transmitting objects overlapping with the emitted light, the emitted light is only blocked by one light-transmitting object, while other light-transmitting objects Light objects cannot determine whether they block the light, so that it is impossible to detect the presence of multiple light-transmittable objects, and the above method can only detect the existence of light-transmittable objects. When the position of the light-transmittable objects is tilted , the above method cannot detect

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  • Method for on-position detecting a light-permeable object and device for detecting
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  • Method for on-position detecting a light-permeable object and device for detecting

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Embodiment Construction

[0039] The present invention provides a method and apparatus capable of detecting the presence of one or more optically permeable objects.

[0040] Its core is to detect the change value of the light intensity after the incident light passes through the target position where the light-transmitting object is located, and then judge the light intensity change value by comparing the light intensity change value with the preset light intensity change value. The position state of the light object at the target position.

[0041] In order to describe the present invention more clearly, the specific implementation manner thereof will be described in detail below in conjunction with the accompanying drawings of the present invention. Such as image 3 As shown, the specific detection process is as follows:

[0042] Step 11: first send the measured light-transmitting object to the target position through the manipulator or other transmission devices;

[0043] Among them, one or more ...

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Abstract

The invention provides a position detecting method and a detecting device for light penetrating objects; particularly, position states of the light penetrating objects can be judged by detecting the change value of light strength which is obtained after the incident light penetrates the light penetrating objects and by making comparison of the obtained change values of light strength with preset change values of light strength. Through the implementation of the method, the detection of the position states of a plurality of light penetrating objects can be realized so as to ensure more reliability and safety for the transmission process of the light penetrating objects.

Description

technical field [0001] The invention relates to the detection field of light-transmittable objects, in particular to an in-situ detection method and a detection device in the production process of light-transmissible objects. Background technique [0002] At present, in the production process of light-transmitting objects, in order to ensure the high quality of the product, the reliability and safety requirements of the production process are very high. Generally, such products are finished by modern mechanical processing. During the processing, the products need to be inspected and monitored at any time to ensure their normal transmission and operation. Among them, any object that can allow light to pass through and produce changes in light intensity can be called a light-transmittable object, such as a semiconductor wafer. In the production process of semiconductor wafers, the wafer needs to be transferred from the chamber to the reaction chamber for process processing. A...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/66G01V8/10G01B11/00G01B11/26
Inventor 张之山
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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