Components having sharpen waveguide y-y-branches angle

Abstract

Substantially sharp corners for optical waveguides in integrated optical devices, photonic crystal devices, or for micro-devices, can be fabricated. Non-sharp corners such as rounded corners, are first formed using lithographic patterning and vertical etching. Next, isotropic etching is used to sharpen the rounded corners. A monitor can be used to determine if the rounded corners have been sufficiently sharpened by the isotropic etching.

Description

[0001] This application is a divisional application of Chinese patent application 02807043.7 (PCT / US02 / 02285), and the filing date of the original application is January 25, 2002. technical field [0002] The disclosure herein relates generally to circuit fabrication, and particularly, but not exclusively, to devices including corners in a Y-leg that are sharpened, such as those of integrated optics, photonic crystal devices, and other microdevices. Background technique [0003] Integrated optics, such as those formed on planar lightwave circuit chips, typically include optical components in the form of optical waveguides. In fact, optical waveguides are often the fundamental components of all integrated optics. Optical waveguides are used to guide optical signals from one location to another, and are often bifurcated or "split" at different locations to allow the optical signal to be passed to several different locations. A "Y-branch" splitter configuration for an optical ...

AI Technical Summary

Problems solved by technology

Furthermore, due to the wave nature of light used in photolithographic methods and the surface tension of photoresists during exposure and development, the resulting edges are rounded, which limits the optical performance of some devices

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