High-frequency error detecting apparatus and method for heavy caliber heavy relative aperture aspherical mirror

Abstract

The invention discloses a high-frequency error detection device and method in the large caliber large relative aperture non-spherical mirror, the device including the five-axis movement adjustment platform with the interferometer focusing platform, the side swing reflecting mirror side swing platform located in front of the interferometer focusing platform, and the measured non-spherical mirror 3D movement adjustment platform located below the side swing reflection mirror side swing platform, and the multiple points supporting machine with the laser wave surface interferometer, the side swing reflection mirrors, and the measured non-spherical mirror installed on the corresponding platforms, and the main control computer with built-in detection data-processing algorithm program connecting with the laser wave surface interferometer. The device uses the main control computer to process the detection data-processing algorithm, which can combine the detected multiple part regions error surface maps into error surface map with medium or high frequency in full caliber, including the initial pose determining method, the overlapping regional data extraction algorithm and the regional data stitching algorithm. The invention is a high-frequency error detection device and method with low-cost, high-precision, high-efficiency in the large caliber large relative aperture non-spherical mirror.

Description

technical field [0001] The technical field of optical testing of the present invention mainly relates to a detection device and method for medium and high frequency surface shape errors of a rotationally symmetrical large-aperture large-relative-aperture aspheric mirror. Background technique [0002] In order to increase the light-gathering ability and peak light intensity of the system, and shorten the lens barrel to reduce costs, a prominent feature of high-tech optical equipment such as a new generation of astronomical telescopes is large diameter and large relative aperture. People predict from the time function curve of the development process that the relative apertures of the primary mirrors of large reflective telescopes in the 21st century will be roughly distributed between 1:1.5 and 1:1. For large-diameter and large-relative-aperture aspheric mirrors, in addition to low-frequency surface shape errors that will affect the resolution of the imaging system and reduce...

AI Technical Summary

Problems solved by technology

This method is mainly used for the detection of aspheric mirrors with a caliber below 200mm. For aspheric mirrors with large diameters and large relative apertures, due to the increase in the stroke of the motion adjustment platform, the accuracy requirements remain unchanged; and the load increases, and the optical path is lengthened. New optical path and structure design

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