Pumping system for evacuating gas from a plurality of chambers and method for controlling the pumping system

Abstract

A pumping system for evacuating gas from a plurality of chambers, includes at least one turbomolecular pump, at least two fore-vacuum pumps, at least one connection conduit extending between the at least two fore-vacuum pumps. and at least one transverse constriction for at least one of reducing and regulating gas flow.

Description

BACKGROUND OF THE INVENTION[0001]1. Field of the Invention[0002]The invention relates to a pumping system for evacuating gas from a plurality of chambers and to a method of controlling the pumping system.[0003]2. Description of the Prior Art[0004]Practically, the entire system consists of one or more vacuum chambers (recipients). These chambers can be used separately, however, they may be connected, at least partially, with each other. In this case, at a set pressure difference, a substantial gas flow takes place therebetween through an opening formed in a common wall between two process chambers or through a tubular conduit connecting the chambers. One or several chambers can also be subjected to gas loads which can also result from connection with the chamber environment (atmosphere), from gas loads transmitted from upstream-located chambers, from otherwise generated, mostly process-dependent, gas flows, and also from admitted inert or process gases such as helium, from desorption...

AI Technical Summary

Benefits of technology

The patent text describes a vacuum system that has separate chambers connected to each other and operates at different vacuum levels. The system includes valves to control the flow of gas between the chambers. The vacuum pumps used in the system are capable of handling high discharge pressures. A transverse constriction is used to relieve one of the vacuum pumps and ensure the other pump can maintain a certain level of discharge pressure. The technical effects of this system include improved vacuum control and better adaptation to different process conditions.

Problems solved by technology

The greater is the gas load a pump should handle, the higher is the energy consumption and the associated therewith cooling requirements, and electrical and mechanical losses caused by gas friction.

In actual cases, the gas loads and vacuum differ greatly from chamber to chamber, and adaptation of the noise reduction to existing possibilities while maintaining the desired process characteristics, is difficult and only possible when considering the balance of interests.

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