Process for manufacturing an integrated membrane of nozzles in MEMS technology for a spray device and spray device using such membrane

Abstract

A process for manufacturing a membrane of nozzles of a spray device, comprising the steps of laying a substrate, forming a membrane layer on the substrate, forming a plurality of nozzles in the membrane layer, forming a plurality of supply channels in the substrate, each supply channel being substantially aligned in a vertical direction to a respective nozzle of the plurality of nozzles and in direct communication with the respective nozzle.

Description

BACKGROUND[0001]1. Technical Field[0002]The present disclosure relates to a process for manufacturing an integrated membrane of nozzles in MEMS technology for a spray device, and to the spray device that uses such membrane, in particular a spray or aerosol device of an inhaler used for administration of pharmaceutical products, parapharmaceutical products, or perfumes.[0003]2. Description of the Related Art[0004]For example, in applications in the medical field, inhalers of a known type are generally used for administering medicaments in controlled doses or for a wide range of aerosol-based therapies.[0005]An inhaler supplies the medicament, which is in liquid form, as a nebulized dispersion of drops. Preferably, an inhaler is of contained dimensions and generally operated with a battery so that the patient is able to carry it with him and use it in a discrete way.[0006]Inhalers of a known type, for example, of the type described in U.S. Pat. No. 6,196,219, generally comprise a memb...

AI Technical Summary

Problems solved by technology

Various membranes of nozzles for inhalers have been proposed; however, some of these require a particularly complex manufacturing process, whilst others do not enable a high reproducibility of the nozzles.

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