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Point-of-use mixing method with standard deviation homogeneity monitoring

a technology of homogeneity monitoring and point-of-use mixing, applied in the direction of controlling the mixing ratio of fluids with different temperatures, process and machine control, instruments, etc., can solve the problems of unsatisfactory delays, waste of chemistry resources, and inability to meet the requirements of the test results

Inactive Publication Date: 2007-02-22
TRES ARK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

While these methods may be successful for some applications to assure quality of process, they each may employ unwanted and undesirable delays.
If the test fails, draining and refilling the chemistry subsequent to the test results may be required.
This may result in unacceptable delays, additional costs and additional cycle time to the manufacturing process in certain applications.

Method used

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  • Point-of-use mixing method with standard deviation homogeneity monitoring
  • Point-of-use mixing method with standard deviation homogeneity monitoring
  • Point-of-use mixing method with standard deviation homogeneity monitoring

Examples

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Embodiment Construction

[0030] According to certain embodiments, there is provided a system and method of formulating a composition comprising at least two chemicals. Chemicals that may be used include, but are not limited to acids (e.g., inorganic acids, mineral acids, and organic acids), bases (e.g., inorganic bases and organic bases), and carrier fluids (e.g., water, alcohols, etc.). Chemicals that may be mixed include solids, liquids, gases and combinations thereof. Generally, the chemicals are dispensed into a container to partially fill it. The quantities of the chemicals in the container are determined, and a ratio of a target quantity to the determined current quantity for at least one chemical is calculated. As used herein the “quantity” of a chemical refers to any of the following measurements of the chemical: weight, volume, weight percent, volume percent and concentration. The next quantity of that chemical to be admitted to the admixture is calculated by multiplying the target quantity by the ...

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PUM

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Abstract

There is disclosed a system and method of formulating a batch comprising at least two chemicals. An embodiment is disclosed wherein a feedforward algorithm can be used to control the target blend. Subsequently a feedback closed loop control loop algorithm is provided for a multivariant blend. Use of this approach allows for a continuously autoreplenished and controlled blend. Also disclosed is the ability to control via feedforward and feedback algorithms a fast responding control mode that allows for the elimination of a container. This approach will allow for “one pass” blending with control. The controller implements an automated fault detection and correction system, thereby identifying necessary maintenance prior to failure. If failure does occur the signature recognition allows rapid analysis and correction thus maximizing tool availability.

Description

PRIORITY CLAIM [0001] This application is a continuation-in-part of U.S. patent application Ser. No. 11 / 177,930 entitled “Chemical Mixing Apparatus, System and Method”, filed Jul. 8, 2005, which is incorporated herein by reference in its entirety.BACKGROUND OF THE INVENTION [0002] 1. Field of the Invention [0003] The present invention relates in general to an apparatus, system and method for mixing chemicals. More particularly the present invention general relates to such an apparatus, system and method for mixing chemicals in a precise manner in accordance with a given formulation. [0004] 2. Description of the Relevant Art [0005] This section describes the background of the disclosed embodiment of the present invention. There is no intention, either express or implied, that the background art discussed in this section legally constitutes prior art. [0006] Currently, many manufacturing processes require the use of blended chemical compositions to treat parts during different steps o...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): G05B21/00
CPCB01F13/1055B01F15/00207G05D11/133G05D11/139H01L21/67253B01F33/84B01F35/213
Inventor ANDERSON, GARY R.FOWLER, MATT
Owner TRES ARK
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