Integrated five freedom electric eddy sensor
An eddy current sensor and degree-of-freedom technology, which is applied in the direction of using electrical/magnetic devices to transmit sensing components, instruments, and electrical devices, can solve problems such as complex structure and large volume, simplify circuit structure, and eliminate beat frequency interference. , the effect of reducing weight
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[0018] The integrated, five-degree-of-freedom eddy current sensor 1 is composed of 12 sensor probes (P1 to P12) and corresponding measurement circuits. The present invention can be designed as an inner rotor or an outer rotor structure according to different structural forms of the magnetic bearing rotor. The outer rotor structure of the present invention is shown in Figure 1. Figure 2 is the detection surface of the radial sensor probe, which is the inner surface of the rotor. The detection surface is external to the radial sensor probe. P1 and P2 form a pair along the X axis. The two directions respectively located on the X axis form an angle of 180°. P3 and P4 form a pair along the Y axis, which are located at an angle of 180° in the two directions of the Y axis, and are installed on the outer circumference of the sensor. 8 axial sensor probes (P5~P12) are symmetrically distributed on the two end faces of the sensor in the Z axis direction, 31 and 32 are the axial detection fac...
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