Electromechanical switch

A technology of electromechanical switches and moving electrodes, which is applied in the direction of electric switches, circuits, relays, etc., and can solve the problem of small electrode capacitance

Inactive Publication Date: 2007-04-04
PANASONIC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, the capacitance value

Method used

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Examples

Experimental program
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Effect test

no. 1 example

[0133] FIG. 1 is an external view illustrating the configuration of a unit element of an electromechanical switch according to a first embodiment.

[0134] 2 is a partial cross-sectional view illustrating the configuration of an essential portion of each of the first electromechanical switch and the second electromechanical switch of the first embodiment.

[0135] As shown in FIGS. 1 and 2, an electromechanical switch 1 according to the first embodiment has an electromechanical switch main body 10 formed on a silicon substrate 2 and covered with a sealing cover glass 3, and also has an electromechanical switch functioning as an input / output terminal. A first electrode terminal 4 , a second electrode terminal 5 , a third electrode terminal 6 , a fourth electrode terminal 7 , a fifth electrode terminal 8 and a sixth electrode terminal 9 .

[0136] As shown in FIG. 2, the electromechanical switch body 10 has a first movable electrode 14 and a second movable electrode 16, both end...

no. 2 example

[0225] Next, a second embodiment will be described below.

[0226] Fig. 17 is a schematic diagram illustrating the configuration of an example of the second embodiment.

[0227] There are no restrictions on the construction and material of the electromechanical switch. As long as the response time of the electromechanical switch corresponding to the natural vibration of the movable electrode is obtained by setting the shape and material of the movable electrode, which is equal to or less than an expected value, the set shape and material can be used. In a second embodiment, a relative change in spring force is implemented.

[0228] As shown in FIG. 17, the electromechanical switch 200 according to the second embodiment has a first movable electrode 202, a second movable electrode 204, and a third movable electrode 206, and both ends of each movable electrode are placed and fixed to Formed on the first anchor 201 and the second anchor 203 on the silicon substrate 2 . The for...

no. 3 example

[0252] Next, a third embodiment of the present invention will be described below. Fig. 19 is a top view illustrating an electromechanical switch according to a third embodiment of the present invention. Similar to the first embodiment, the electromechanical switch according to the third embodiment includes a plurality of switches having different spring forces. The third embodiment prevents the disadvantage of not being able to pull in the second movable electrode with a strong spring force in the disconnected state, even if the first movable electrode is locked by the fixed electrode due to some malfunction; And the second movable electrode is finally in the middle position, so that both the first movable electrode and the second movable electrode are in the disconnected state, which is similar to the first embodiment.

[0253] That is, each of the first movable electrode and the second movable electrode will It will also reach the middle position through free vibration, so...

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Abstract

There is provided an electro-mechanical switch capable of performing high-speed switching response with a low drive voltage. An electro-mechanical switch main body (10) which is a MEMS switch includes a first movable electrode (14) and a second movable electrode (16) having both ends fixed and bridged by a first anchor (12) and a second anchor (13) formed on a silicon substrate (2) and a fixed electrode (18) opposing to these movable electrodes. The first movable electrode (14) having a relatively weak spring force and the fixed electrode (18) constitute a first electro-mechanical switch (22) which can be driven with a low voltage. The second movable electrode (16) having a relatively strong spring force and the fixed electrode (18) constitute a second electro-mechanical switch (24) which can be driven and latched with a low voltage. The first movable electrode (14) is rapidly displaced by a low drive voltage to rapidly turn on the first electro-mechanical switch and the second movable electrode (16) rapidly performs natural oscillation by the restoration force to rapidly turn off the second electro-mechanical switch. The returning second movable electrode (16) is latched with low drive voltage and the second electro-mechanical switch is turned on.

Description

technical field [0001] The present invention relates to a microelectromechanical system switch (hereinafter "MEMS" switch), and more particularly, to an electromechanical switch with low drive voltage. Background technique [0002] RF switches (radio frequency and microwave switches) such as HEMT switches, MESFET switches, and PIN diode switches using GaAs substrates are currently the mainstream of RF switches. [0003] However, in order to realize higher performance and lower power consumption of wireless terminals, it has been proposed to utilize devices employing microelectromechanical elements in addition to conventional semiconductor elements. [0004] This device is an electromechanical switch suitable for driving microelectrodes by electrostatic force or the like, and mechanically controlling the relative distance between the electrodes, thereby performing on and off operations of signals. When switched on, the electrodes are in electrical contact with each other. T...

Claims

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Application Information

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IPC IPC(8): H01H1/26H01H57/00B81B3/00H01H59/00H01H9/54H01H61/00H01H55/00
Inventor 中西淑人
Owner PANASONIC CORP
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