Thin sheet-like article displacement detection method and displacement correction method

Abstract

During the taking-out or storing of thin sheet-like articles, the deviation of a thin sheet-like article from its proper position is detected and the correcting operation therefor is efficiently performed. A detection means (18) is installed on a support arm (14). The detection means (18) is ko-shaped (ko represents a Japanese kana character pronounced as / ko / ), with its open end being on the endeffecter (11) side, the detection means being constructed to have a substantial depth to allow the thin sheet-like article (2) to pass without interference.

Description

technical field [0001] The present invention relates to a transfer robot for handling thin plate-like objects that require high positional accuracy when placing them for conveyance and processing. In particular, the present invention relates to a robot for placing the following thin plate-like objects in boxes and various processes. A conveying device that moves between devices. The thin plate refers to thin plates such as semiconductor wafers, liquid crystal display panel substrates, plasma display substrates, organic electroluminescent substrates, inorganic electroluminescent substrates, printed circuit wiring substrates, etc. shape. Background technique [0002] Generally, thin plate-like objects such as semiconductors and liquid crystal substrates are manufactured in a highly clean environment, so-called clean room. The conveyance of the above-mentioned thin plate-like objects in this clean room is carried out for each case by a large-scale robot for case conveyance, et...

AI Technical Summary

Problems solved by technology

In this transport robot, since it is necessary to separately install a power source such as a motor of the rotation detection mechanism 14, there is a problem that it costs a separate cost, the mechanism is complicated, and motion control is also difficult.

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