Glancing incidence flat field spectrometer
A grazing incidence and spectrometer technology, applied in the field of spectrometers, can solve the problems of low spectral resolution and spatial resolution, high cost of grazing incidence flat-field spectrometers, and small spectral range, so as to improve sensitivity and increase collection The effect of solid angle and extended spectral range
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[0061] The spectrometer adopts a grazing incidence method to improve the transmission efficiency of soft X-rays. The spectrometer of the present invention is mainly made up of toroidal mirror (also known as tire mirror), slit, flat field grating, soft X-ray CCD camera and corresponding vacuum system, as Figure 4A shown. The toroidal mirror has different curvature radii on the meridian plane and the sagittal plane, and the reflection surface of the flat-field grating is spherical. On the meridian plane, the soft X-rays are collected by the toroidal mirror and reflected and imaged on the slit, and then dispersed by the flat-field grating and focused and imaged on the focal plane to achieve spectral resolution. On the sagittal plane, soft X-rays are collected by a toroidal mirror and reflected into a virtual image in the distance (see Figure 4B middle virtual image), and then imaged on the focal plane through a flat-field grating to achieve s...
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